JPS6154272A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS6154272A
JPS6154272A JP17489684A JP17489684A JPS6154272A JP S6154272 A JPS6154272 A JP S6154272A JP 17489684 A JP17489684 A JP 17489684A JP 17489684 A JP17489684 A JP 17489684A JP S6154272 A JPS6154272 A JP S6154272A
Authority
JP
Japan
Prior art keywords
mist
cleaning
solvent
cleaning device
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17489684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439395B2 (enExample
Inventor
村川　俊隆
白井　貢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17489684A priority Critical patent/JPS6154272A/ja
Publication of JPS6154272A publication Critical patent/JPS6154272A/ja
Publication of JPH0439395B2 publication Critical patent/JPH0439395B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP17489684A 1984-08-24 1984-08-24 洗浄装置 Granted JPS6154272A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17489684A JPS6154272A (ja) 1984-08-24 1984-08-24 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17489684A JPS6154272A (ja) 1984-08-24 1984-08-24 洗浄装置

Publications (2)

Publication Number Publication Date
JPS6154272A true JPS6154272A (ja) 1986-03-18
JPH0439395B2 JPH0439395B2 (enExample) 1992-06-29

Family

ID=15986578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17489684A Granted JPS6154272A (ja) 1984-08-24 1984-08-24 洗浄装置

Country Status (1)

Country Link
JP (1) JPS6154272A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392405B1 (en) 1998-03-09 2002-05-21 Press Kogyo Kk Rotation detection sensor ring and method of making the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392405B1 (en) 1998-03-09 2002-05-21 Press Kogyo Kk Rotation detection sensor ring and method of making the same

Also Published As

Publication number Publication date
JPH0439395B2 (enExample) 1992-06-29

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