JPS6149391B2 - - Google Patents

Info

Publication number
JPS6149391B2
JPS6149391B2 JP12347883A JP12347883A JPS6149391B2 JP S6149391 B2 JPS6149391 B2 JP S6149391B2 JP 12347883 A JP12347883 A JP 12347883A JP 12347883 A JP12347883 A JP 12347883A JP S6149391 B2 JPS6149391 B2 JP S6149391B2
Authority
JP
Japan
Prior art keywords
sample
susceptor
holder
reaction tube
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12347883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6017076A (ja
Inventor
Nobuaki Konno
Kazuhisa Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP12347883A priority Critical patent/JPS6017076A/ja
Publication of JPS6017076A publication Critical patent/JPS6017076A/ja
Publication of JPS6149391B2 publication Critical patent/JPS6149391B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP12347883A 1983-07-08 1983-07-08 気相成長用装置 Granted JPS6017076A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12347883A JPS6017076A (ja) 1983-07-08 1983-07-08 気相成長用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12347883A JPS6017076A (ja) 1983-07-08 1983-07-08 気相成長用装置

Publications (2)

Publication Number Publication Date
JPS6017076A JPS6017076A (ja) 1985-01-28
JPS6149391B2 true JPS6149391B2 (enExample) 1986-10-29

Family

ID=14861621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12347883A Granted JPS6017076A (ja) 1983-07-08 1983-07-08 気相成長用装置

Country Status (1)

Country Link
JP (1) JPS6017076A (enExample)

Also Published As

Publication number Publication date
JPS6017076A (ja) 1985-01-28

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