JPH0510315B2 - - Google Patents
Info
- Publication number
- JPH0510315B2 JPH0510315B2 JP17477386A JP17477386A JPH0510315B2 JP H0510315 B2 JPH0510315 B2 JP H0510315B2 JP 17477386 A JP17477386 A JP 17477386A JP 17477386 A JP17477386 A JP 17477386A JP H0510315 B2 JPH0510315 B2 JP H0510315B2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- crystal
- temperature
- raw material
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 54
- 239000002994 raw material Substances 0.000 claims description 18
- 238000002109 crystal growth method Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 description 12
- 229910052736 halogen Inorganic materials 0.000 description 7
- 150000002367 halogens Chemical class 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- -1 ZnS and ZnSe Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 239000006163 transport media Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17477386A JPS6330396A (ja) | 1986-07-24 | 1986-07-24 | 結晶成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17477386A JPS6330396A (ja) | 1986-07-24 | 1986-07-24 | 結晶成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6330396A JPS6330396A (ja) | 1988-02-09 |
| JPH0510315B2 true JPH0510315B2 (enExample) | 1993-02-09 |
Family
ID=15984417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17477386A Granted JPS6330396A (ja) | 1986-07-24 | 1986-07-24 | 結晶成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6330396A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0563675U (ja) * | 1992-01-30 | 1993-08-24 | 上原ネームプレート工業株式会社 | 蒸着処理標体 |
-
1986
- 1986-07-24 JP JP17477386A patent/JPS6330396A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330396A (ja) | 1988-02-09 |
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