JPS6146970B2 - - Google Patents

Info

Publication number
JPS6146970B2
JPS6146970B2 JP53069476A JP6947678A JPS6146970B2 JP S6146970 B2 JPS6146970 B2 JP S6146970B2 JP 53069476 A JP53069476 A JP 53069476A JP 6947678 A JP6947678 A JP 6947678A JP S6146970 B2 JPS6146970 B2 JP S6146970B2
Authority
JP
Japan
Prior art keywords
wafer
wafers
semiconductor wafer
metal film
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53069476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54159864A (en
Inventor
Yoshiaki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6947678A priority Critical patent/JPS54159864A/ja
Publication of JPS54159864A publication Critical patent/JPS54159864A/ja
Publication of JPS6146970B2 publication Critical patent/JPS6146970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP6947678A 1978-06-08 1978-06-08 Storing package of semiconductor wafer Granted JPS54159864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6947678A JPS54159864A (en) 1978-06-08 1978-06-08 Storing package of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6947678A JPS54159864A (en) 1978-06-08 1978-06-08 Storing package of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS54159864A JPS54159864A (en) 1979-12-18
JPS6146970B2 true JPS6146970B2 (cs) 1986-10-16

Family

ID=13403768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6947678A Granted JPS54159864A (en) 1978-06-08 1978-06-08 Storing package of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54159864A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989000334A1 (fr) * 1987-07-08 1989-01-12 Sumitomo Electric Industries, Ltd. Conservation de substrats semi-conducteurs

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611149U (ja) * 1984-06-09 1986-01-07 株式会社 堀場製作所 自動車排ガス分析装置用フイルタ−エレメントパツク

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318473Y2 (cs) * 1972-06-23 1978-05-17
JPS5017330U (cs) * 1973-06-11 1975-02-25
JPS5443461A (en) * 1977-09-12 1979-04-06 Sumitomo Electric Ind Ltd Packing method of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989000334A1 (fr) * 1987-07-08 1989-01-12 Sumitomo Electric Industries, Ltd. Conservation de substrats semi-conducteurs

Also Published As

Publication number Publication date
JPS54159864A (en) 1979-12-18

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