JPS54159864A - Storing package of semiconductor wafer - Google Patents
Storing package of semiconductor waferInfo
- Publication number
- JPS54159864A JPS54159864A JP6947678A JP6947678A JPS54159864A JP S54159864 A JPS54159864 A JP S54159864A JP 6947678 A JP6947678 A JP 6947678A JP 6947678 A JP6947678 A JP 6947678A JP S54159864 A JPS54159864 A JP S54159864A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plastic film
- concave
- taper
- vinyl chloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging Frangible Articles (AREA)
Abstract
PURPOSE: To offer advantage to handling, transfer and keeping of wafers to hold quality and reliability by storing wafers in a package containing inactive gas.
CONSTITUTION: Wafer 1 is put on aluminum foil 2 faceup, and hard plastic film 4 such as a vinyl chloride film having a concave whose volume is equal to that of the wafer approximately is put on the wafer. Then, the surface of the aluminum foil in the space part where the wafer is not put and the flat part of the vinyl chloride film are subjected to thermal compression bonding in an inactive gas atmosphere and are sealed hermetrically. At this time, a taper is provided on the side face of the concave of the plastic film so that the hard plastic film inside wall and the wafer surface may be prevented from being brought into contact with each other. As a result, the taper on the concave side face functions of fix the wafer and the wafer surface is always placed in space even is the stored wafer is vibrated in carriage.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6947678A JPS54159864A (en) | 1978-06-08 | 1978-06-08 | Storing package of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6947678A JPS54159864A (en) | 1978-06-08 | 1978-06-08 | Storing package of semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54159864A true JPS54159864A (en) | 1979-12-18 |
JPS6146970B2 JPS6146970B2 (en) | 1986-10-16 |
Family
ID=13403768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6947678A Granted JPS54159864A (en) | 1978-06-08 | 1978-06-08 | Storing package of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54159864A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS611149U (en) * | 1984-06-09 | 1986-01-07 | 株式会社 堀場製作所 | Filter element pack for automobile exhaust gas analyzer |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6413718A (en) * | 1987-07-08 | 1989-01-18 | Sumitomo Electric Industries | Method for storing semiconductor substrate |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933185U (en) * | 1972-06-23 | 1974-03-23 | ||
JPS5017330U (en) * | 1973-06-11 | 1975-02-25 | ||
JPS5443461A (en) * | 1977-09-12 | 1979-04-06 | Sumitomo Electric Ind Ltd | Packing method of semiconductor wafer |
-
1978
- 1978-06-08 JP JP6947678A patent/JPS54159864A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933185U (en) * | 1972-06-23 | 1974-03-23 | ||
JPS5017330U (en) * | 1973-06-11 | 1975-02-25 | ||
JPS5443461A (en) * | 1977-09-12 | 1979-04-06 | Sumitomo Electric Ind Ltd | Packing method of semiconductor wafer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS611149U (en) * | 1984-06-09 | 1986-01-07 | 株式会社 堀場製作所 | Filter element pack for automobile exhaust gas analyzer |
Also Published As
Publication number | Publication date |
---|---|
JPS6146970B2 (en) | 1986-10-16 |
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