Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin LtdfiledCriticalTeijin Ltd
Priority to JP12981579ApriorityCriticalpatent/JPS5654230A/ja
Publication of JPS5654230ApublicationCriticalpatent/JPS5654230A/ja
Publication of JPS6144951B2publicationCriticalpatent/JPS6144951B2/ja
Coating solutions for use in forming bismuth-based ferroelectric thin films, and ferroelectric thin films, ferroelectric capacitors and ferroelectric memories formed with said coating solutions, as well as processes for production thereof
Coating solutions for use in forming bismuth-based dielectric thin films, and dielectric thin films and memories formed with said coating solutions, as well as processes for production thereof
Pzt-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming pzt-based ferroelectric thin film using the same