JPS6144437A - 半導体特性測定装置 - Google Patents

半導体特性測定装置

Info

Publication number
JPS6144437A
JPS6144437A JP15221685A JP15221685A JPS6144437A JP S6144437 A JPS6144437 A JP S6144437A JP 15221685 A JP15221685 A JP 15221685A JP 15221685 A JP15221685 A JP 15221685A JP S6144437 A JPS6144437 A JP S6144437A
Authority
JP
Japan
Prior art keywords
sample
phase
wafer
lifetime
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15221685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237531B2 (enrdf_load_stackoverflow
Inventor
Noriaki Honma
本間　則秋
Tadasuke Munakata
忠輔 棟方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15221685A priority Critical patent/JPS6144437A/ja
Publication of JPS6144437A publication Critical patent/JPS6144437A/ja
Publication of JPS6237531B2 publication Critical patent/JPS6237531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15221685A 1985-07-12 1985-07-12 半導体特性測定装置 Granted JPS6144437A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15221685A JPS6144437A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15221685A JPS6144437A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Publications (2)

Publication Number Publication Date
JPS6144437A true JPS6144437A (ja) 1986-03-04
JPS6237531B2 JPS6237531B2 (enrdf_load_stackoverflow) 1987-08-13

Family

ID=15535612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15221685A Granted JPS6144437A (ja) 1985-07-12 1985-07-12 半導体特性測定装置

Country Status (1)

Country Link
JP (1) JPS6144437A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7663385B2 (en) * 2002-12-13 2010-02-16 Nanometrics Incorporated Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04119479U (ja) * 1991-04-05 1992-10-26 矢崎総業株式会社 車両用表示装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7663385B2 (en) * 2002-12-13 2010-02-16 Nanometrics Incorporated Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor
US8232817B2 (en) 2002-12-13 2012-07-31 Nanometrics Incorporated Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor
US9110127B2 (en) 2002-12-13 2015-08-18 Nanometrics Incorporated Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor

Also Published As

Publication number Publication date
JPS6237531B2 (enrdf_load_stackoverflow) 1987-08-13

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