JPS6237531B2 - - Google Patents
Info
- Publication number
- JPS6237531B2 JPS6237531B2 JP15221685A JP15221685A JPS6237531B2 JP S6237531 B2 JPS6237531 B2 JP S6237531B2 JP 15221685 A JP15221685 A JP 15221685A JP 15221685 A JP15221685 A JP 15221685A JP S6237531 B2 JPS6237531 B2 JP S6237531B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- phase
- light beam
- semiconductor
- photovoltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 14
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 239000000969 carrier Substances 0.000 description 7
- 230000001066 destructive effect Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15221685A JPS6144437A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15221685A JPS6144437A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144437A JPS6144437A (ja) | 1986-03-04 |
| JPS6237531B2 true JPS6237531B2 (enrdf_load_stackoverflow) | 1987-08-13 |
Family
ID=15535612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15221685A Granted JPS6144437A (ja) | 1985-07-12 | 1985-07-12 | 半導体特性測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144437A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04119479U (ja) * | 1991-04-05 | 1992-10-26 | 矢崎総業株式会社 | 車両用表示装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7663385B2 (en) * | 2002-12-13 | 2010-02-16 | Nanometrics Incorporated | Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor |
-
1985
- 1985-07-12 JP JP15221685A patent/JPS6144437A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04119479U (ja) * | 1991-04-05 | 1992-10-26 | 矢崎総業株式会社 | 車両用表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144437A (ja) | 1986-03-04 |
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