JPS6242537Y2 - - Google Patents

Info

Publication number
JPS6242537Y2
JPS6242537Y2 JP1981175369U JP17536981U JPS6242537Y2 JP S6242537 Y2 JPS6242537 Y2 JP S6242537Y2 JP 1981175369 U JP1981175369 U JP 1981175369U JP 17536981 U JP17536981 U JP 17536981U JP S6242537 Y2 JPS6242537 Y2 JP S6242537Y2
Authority
JP
Japan
Prior art keywords
light
semiconductor wafer
wafer
photovoltage
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981175369U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5881944U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17536981U priority Critical patent/JPS5881944U/ja
Publication of JPS5881944U publication Critical patent/JPS5881944U/ja
Application granted granted Critical
Publication of JPS6242537Y2 publication Critical patent/JPS6242537Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17536981U 1981-11-27 1981-11-27 半導体ウエハ検査装置 Granted JPS5881944U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17536981U JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17536981U JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Publications (2)

Publication Number Publication Date
JPS5881944U JPS5881944U (ja) 1983-06-03
JPS6242537Y2 true JPS6242537Y2 (enrdf_load_stackoverflow) 1987-10-31

Family

ID=29967703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17536981U Granted JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Country Status (1)

Country Link
JP (1) JPS5881944U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3650917B2 (ja) * 1997-08-29 2005-05-25 株式会社神戸製鋼所 表面光電圧による半導体表面評価方法及び装置
US6894519B2 (en) * 2002-04-11 2005-05-17 Solid State Measurements, Inc. Apparatus and method for determining electrical properties of a semiconductor wafer
JP2006073572A (ja) * 2004-08-31 2006-03-16 Oki Electric Ind Co Ltd 半導体結晶欠陥検査方法、半導体結晶欠陥検査装置、及びその半導体結晶欠陥検査装置を用いた半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543880A (en) * 1978-09-22 1980-03-27 Takeshi Kizaki Non-contact measurement of semiconductor carrier concentration and conductivity by capacitance-coupling
JPS56155543A (en) * 1981-04-08 1981-12-01 Hitachi Ltd Measuring device for semiconductor characteristic

Also Published As

Publication number Publication date
JPS5881944U (ja) 1983-06-03

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