JPS5881944U - 半導体ウエハ検査装置 - Google Patents

半導体ウエハ検査装置

Info

Publication number
JPS5881944U
JPS5881944U JP17536981U JP17536981U JPS5881944U JP S5881944 U JPS5881944 U JP S5881944U JP 17536981 U JP17536981 U JP 17536981U JP 17536981 U JP17536981 U JP 17536981U JP S5881944 U JPS5881944 U JP S5881944U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer inspection
signal
inspection equipment
extracting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17536981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242537Y2 (enrdf_load_stackoverflow
Inventor
本間　則秋
忠輔 棟方
渋谷　秀夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17536981U priority Critical patent/JPS5881944U/ja
Publication of JPS5881944U publication Critical patent/JPS5881944U/ja
Application granted granted Critical
Publication of JPS6242537Y2 publication Critical patent/JPS6242537Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17536981U 1981-11-27 1981-11-27 半導体ウエハ検査装置 Granted JPS5881944U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17536981U JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17536981U JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Publications (2)

Publication Number Publication Date
JPS5881944U true JPS5881944U (ja) 1983-06-03
JPS6242537Y2 JPS6242537Y2 (enrdf_load_stackoverflow) 1987-10-31

Family

ID=29967703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17536981U Granted JPS5881944U (ja) 1981-11-27 1981-11-27 半導体ウエハ検査装置

Country Status (1)

Country Link
JP (1) JPS5881944U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174325A (ja) * 1997-08-29 1999-03-16 Kobe Steel Ltd 表面光電圧による半導体表面評価方法及び装置
JP2003318236A (ja) * 2002-04-11 2003-11-07 Solid State Measurements Inc 半導体ウェハの電気特性測定装置及び測定方法
JP2006073572A (ja) * 2004-08-31 2006-03-16 Oki Electric Ind Co Ltd 半導体結晶欠陥検査方法、半導体結晶欠陥検査装置、及びその半導体結晶欠陥検査装置を用いた半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543880A (en) * 1978-09-22 1980-03-27 Takeshi Kizaki Non-contact measurement of semiconductor carrier concentration and conductivity by capacitance-coupling
JPS56155543A (en) * 1981-04-08 1981-12-01 Hitachi Ltd Measuring device for semiconductor characteristic

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543880A (en) * 1978-09-22 1980-03-27 Takeshi Kizaki Non-contact measurement of semiconductor carrier concentration and conductivity by capacitance-coupling
JPS56155543A (en) * 1981-04-08 1981-12-01 Hitachi Ltd Measuring device for semiconductor characteristic

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1174325A (ja) * 1997-08-29 1999-03-16 Kobe Steel Ltd 表面光電圧による半導体表面評価方法及び装置
JP2003318236A (ja) * 2002-04-11 2003-11-07 Solid State Measurements Inc 半導体ウェハの電気特性測定装置及び測定方法
JP2006073572A (ja) * 2004-08-31 2006-03-16 Oki Electric Ind Co Ltd 半導体結晶欠陥検査方法、半導体結晶欠陥検査装置、及びその半導体結晶欠陥検査装置を用いた半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6242537Y2 (enrdf_load_stackoverflow) 1987-10-31

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