JPH0544187B2 - - Google Patents

Info

Publication number
JPH0544187B2
JPH0544187B2 JP57038014A JP3801482A JPH0544187B2 JP H0544187 B2 JPH0544187 B2 JP H0544187B2 JP 57038014 A JP57038014 A JP 57038014A JP 3801482 A JP3801482 A JP 3801482A JP H0544187 B2 JPH0544187 B2 JP H0544187B2
Authority
JP
Japan
Prior art keywords
sample
junction
current
frequency
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57038014A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58155732A (ja
Inventor
Noriaki Honma
Tadasuke Munakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57038014A priority Critical patent/JPS58155732A/ja
Publication of JPS58155732A publication Critical patent/JPS58155732A/ja
Publication of JPH0544187B2 publication Critical patent/JPH0544187B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57038014A 1982-03-12 1982-03-12 キヤリア寿命測定装置 Granted JPS58155732A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57038014A JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57038014A JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Publications (2)

Publication Number Publication Date
JPS58155732A JPS58155732A (ja) 1983-09-16
JPH0544187B2 true JPH0544187B2 (enrdf_load_stackoverflow) 1993-07-05

Family

ID=12513714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57038014A Granted JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Country Status (1)

Country Link
JP (1) JPS58155732A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3274924B2 (ja) * 1993-12-15 2002-04-15 株式会社東芝 半導体装置のスクリーニング方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856437U (ja) * 1981-10-09 1983-04-16 株式会社日立製作所 半導体接合特性測定装置

Also Published As

Publication number Publication date
JPS58155732A (ja) 1983-09-16

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