JPS6144425A - 半導体基板の熱処理用ボート - Google Patents
半導体基板の熱処理用ボートInfo
- Publication number
- JPS6144425A JPS6144425A JP15902685A JP15902685A JPS6144425A JP S6144425 A JPS6144425 A JP S6144425A JP 15902685 A JP15902685 A JP 15902685A JP 15902685 A JP15902685 A JP 15902685A JP S6144425 A JPS6144425 A JP S6144425A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat treatment
- boats
- wafer
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 39
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 title claims description 6
- 238000009792 diffusion process Methods 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 238000004904 shortening Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 28
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15902685A JPS6144425A (ja) | 1985-07-18 | 1985-07-18 | 半導体基板の熱処理用ボート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15902685A JPS6144425A (ja) | 1985-07-18 | 1985-07-18 | 半導体基板の熱処理用ボート |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14345577A Division JPS5475985A (en) | 1977-11-29 | 1977-11-29 | Heat treatment method of semiconductor substrate and its unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144425A true JPS6144425A (ja) | 1986-03-04 |
| JPS6224938B2 JPS6224938B2 (enrdf_load_stackoverflow) | 1987-05-30 |
Family
ID=15684630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15902685A Granted JPS6144425A (ja) | 1985-07-18 | 1985-07-18 | 半導体基板の熱処理用ボート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144425A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2331288A (en) * | 1994-12-20 | 1999-05-19 | Dainippon Printing Co Ltd | Sawtooth cutter |
| WO2011101798A1 (en) * | 2010-02-18 | 2011-08-25 | Dynamic Micro Systems | Stackable substrate carriers |
-
1985
- 1985-07-18 JP JP15902685A patent/JPS6144425A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2331288A (en) * | 1994-12-20 | 1999-05-19 | Dainippon Printing Co Ltd | Sawtooth cutter |
| GB2331288B (en) * | 1994-12-20 | 1999-06-30 | Dainippon Printing Co Ltd | Sawtooth cutter |
| WO2011101798A1 (en) * | 2010-02-18 | 2011-08-25 | Dynamic Micro Systems | Stackable substrate carriers |
| US10770323B2 (en) | 2010-02-18 | 2020-09-08 | Brooks Automation Gmbh | Stackable substrate carriers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6224938B2 (enrdf_load_stackoverflow) | 1987-05-30 |
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