JPS6141229Y2 - - Google Patents

Info

Publication number
JPS6141229Y2
JPS6141229Y2 JP1980051934U JP5193480U JPS6141229Y2 JP S6141229 Y2 JPS6141229 Y2 JP S6141229Y2 JP 1980051934 U JP1980051934 U JP 1980051934U JP 5193480 U JP5193480 U JP 5193480U JP S6141229 Y2 JPS6141229 Y2 JP S6141229Y2
Authority
JP
Japan
Prior art keywords
wafer
processing gas
gas
wafer container
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980051934U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56155446U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980051934U priority Critical patent/JPS6141229Y2/ja
Publication of JPS56155446U publication Critical patent/JPS56155446U/ja
Application granted granted Critical
Publication of JPS6141229Y2 publication Critical patent/JPS6141229Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1980051934U 1980-04-18 1980-04-18 Expired JPS6141229Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980051934U JPS6141229Y2 (enExample) 1980-04-18 1980-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980051934U JPS6141229Y2 (enExample) 1980-04-18 1980-04-18

Publications (2)

Publication Number Publication Date
JPS56155446U JPS56155446U (enExample) 1981-11-20
JPS6141229Y2 true JPS6141229Y2 (enExample) 1986-11-25

Family

ID=29646815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980051934U Expired JPS6141229Y2 (enExample) 1980-04-18 1980-04-18

Country Status (1)

Country Link
JP (1) JPS6141229Y2 (enExample)

Also Published As

Publication number Publication date
JPS56155446U (enExample) 1981-11-20

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