JPS6138126B2 - - Google Patents

Info

Publication number
JPS6138126B2
JPS6138126B2 JP7742480A JP7742480A JPS6138126B2 JP S6138126 B2 JPS6138126 B2 JP S6138126B2 JP 7742480 A JP7742480 A JP 7742480A JP 7742480 A JP7742480 A JP 7742480A JP S6138126 B2 JPS6138126 B2 JP S6138126B2
Authority
JP
Japan
Prior art keywords
silicon
amorphous silicon
gas
fluidized bed
silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7742480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS573710A (en
Inventor
Fukuhiko Suga
Noribumi Kikuchi
Shinichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7742480A priority Critical patent/JPS573710A/ja
Publication of JPS573710A publication Critical patent/JPS573710A/ja
Publication of JPS6138126B2 publication Critical patent/JPS6138126B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Silicon Compounds (AREA)
JP7742480A 1980-06-09 1980-06-09 Amophous silicon and its production Granted JPS573710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7742480A JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7742480A JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Publications (2)

Publication Number Publication Date
JPS573710A JPS573710A (en) 1982-01-09
JPS6138126B2 true JPS6138126B2 (enExample) 1986-08-27

Family

ID=13633584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7742480A Granted JPS573710A (en) 1980-06-09 1980-06-09 Amophous silicon and its production

Country Status (1)

Country Link
JP (1) JPS573710A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2530607B1 (fr) * 1982-07-26 1985-06-28 Rhone Poulenc Spec Chim Silicium pur, en poudre dense et son procede de preparation
JPS60221311A (ja) * 1984-04-18 1985-11-06 Mitsubishi Gas Chem Co Inc 非晶質複合粉末組成物
ES2331824B1 (es) * 2007-06-18 2010-10-22 Consejo Superior De Investigaciones Cientificas (Csic) Microcabidades opticas y esponjas fotonicas, procedimiento de producc ion y sus aplicaciones en la fabricacion de dispositivos fotonicos.

Also Published As

Publication number Publication date
JPS573710A (en) 1982-01-09

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