JPS6133257B2 - - Google Patents
Info
- Publication number
- JPS6133257B2 JPS6133257B2 JP4568378A JP4568378A JPS6133257B2 JP S6133257 B2 JPS6133257 B2 JP S6133257B2 JP 4568378 A JP4568378 A JP 4568378A JP 4568378 A JP4568378 A JP 4568378A JP S6133257 B2 JPS6133257 B2 JP S6133257B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- platinum
- semiconductor
- forming
- silicide layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical group [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 claims description 13
- 229910021339 platinum silicide Inorganic materials 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 229910021332 silicide Inorganic materials 0.000 claims 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 4
- 238000005275 alloying Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4568378A JPS54137273A (en) | 1978-04-17 | 1978-04-17 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4568378A JPS54137273A (en) | 1978-04-17 | 1978-04-17 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54137273A JPS54137273A (en) | 1979-10-24 |
JPS6133257B2 true JPS6133257B2 (zh) | 1986-08-01 |
Family
ID=12726185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4568378A Granted JPS54137273A (en) | 1978-04-17 | 1978-04-17 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54137273A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5780719A (en) * | 1980-11-07 | 1982-05-20 | Fujitsu Ltd | Semiconductor device |
US11011381B2 (en) * | 2018-07-27 | 2021-05-18 | Texas Instruments Incorporated | Patterning platinum by alloying and etching platinum alloy |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4926740A (zh) * | 1972-07-04 | 1974-03-09 |
-
1978
- 1978-04-17 JP JP4568378A patent/JPS54137273A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4926740A (zh) * | 1972-07-04 | 1974-03-09 |
Also Published As
Publication number | Publication date |
---|---|
JPS54137273A (en) | 1979-10-24 |
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