JPS6132812B2 - - Google Patents

Info

Publication number
JPS6132812B2
JPS6132812B2 JP51150935A JP15093576A JPS6132812B2 JP S6132812 B2 JPS6132812 B2 JP S6132812B2 JP 51150935 A JP51150935 A JP 51150935A JP 15093576 A JP15093576 A JP 15093576A JP S6132812 B2 JPS6132812 B2 JP S6132812B2
Authority
JP
Japan
Prior art keywords
film
phosphorus
psg
mol
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51150935A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5375861A (en
Inventor
Tokio Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15093576A priority Critical patent/JPS5375861A/ja
Publication of JPS5375861A publication Critical patent/JPS5375861A/ja
Publication of JPS6132812B2 publication Critical patent/JPS6132812B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
JP15093576A 1976-12-17 1976-12-17 Semiconductor device Granted JPS5375861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15093576A JPS5375861A (en) 1976-12-17 1976-12-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15093576A JPS5375861A (en) 1976-12-17 1976-12-17 Semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59050954A Division JPS59181541A (ja) 1984-03-19 1984-03-19 半導体装置

Publications (2)

Publication Number Publication Date
JPS5375861A JPS5375861A (en) 1978-07-05
JPS6132812B2 true JPS6132812B2 (OSRAM) 1986-07-29

Family

ID=15507618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15093576A Granted JPS5375861A (en) 1976-12-17 1976-12-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5375861A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612739A (en) * 1979-07-10 1981-02-07 Nec Corp Semiconductor device
JPS6022368A (ja) * 1983-07-18 1985-02-04 Toshiba Corp 半導体装置

Also Published As

Publication number Publication date
JPS5375861A (en) 1978-07-05

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