JPS6131632B2 - - Google Patents

Info

Publication number
JPS6131632B2
JPS6131632B2 JP52036286A JP3628677A JPS6131632B2 JP S6131632 B2 JPS6131632 B2 JP S6131632B2 JP 52036286 A JP52036286 A JP 52036286A JP 3628677 A JP3628677 A JP 3628677A JP S6131632 B2 JPS6131632 B2 JP S6131632B2
Authority
JP
Japan
Prior art keywords
region
polycrystalline silicon
layer
resistance
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52036286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53120388A (en
Inventor
Kazunari Shirai
Moritomo Ito
Takashi Yabu
Shinpei Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3628677A priority Critical patent/JPS53120388A/ja
Publication of JPS53120388A publication Critical patent/JPS53120388A/ja
Publication of JPS6131632B2 publication Critical patent/JPS6131632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP3628677A 1977-03-30 1977-03-30 Production of semiconductor device Granted JPS53120388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3628677A JPS53120388A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3628677A JPS53120388A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53120388A JPS53120388A (en) 1978-10-20
JPS6131632B2 true JPS6131632B2 (enrdf_load_stackoverflow) 1986-07-21

Family

ID=12465536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3628677A Granted JPS53120388A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53120388A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5128991A (en) * 1974-09-04 1976-03-11 Ishikawajima Zosen Kakoki Kk Tagubootoyo no kyuchakusochi
JPS5138990A (en) * 1974-09-30 1976-03-31 Suwa Seikosha Kk Handotaisochino seizohoho

Also Published As

Publication number Publication date
JPS53120388A (en) 1978-10-20

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