JPS6131610B2 - - Google Patents

Info

Publication number
JPS6131610B2
JPS6131610B2 JP13848079A JP13848079A JPS6131610B2 JP S6131610 B2 JPS6131610 B2 JP S6131610B2 JP 13848079 A JP13848079 A JP 13848079A JP 13848079 A JP13848079 A JP 13848079A JP S6131610 B2 JPS6131610 B2 JP S6131610B2
Authority
JP
Japan
Prior art keywords
reticle
pattern
glass substrate
chip
chip pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13848079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5662323A (en
Inventor
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13848079A priority Critical patent/JPS5662323A/ja
Publication of JPS5662323A publication Critical patent/JPS5662323A/ja
Publication of JPS6131610B2 publication Critical patent/JPS6131610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13848079A 1979-10-26 1979-10-26 Reticle examination method Granted JPS5662323A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13848079A JPS5662323A (en) 1979-10-26 1979-10-26 Reticle examination method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13848079A JPS5662323A (en) 1979-10-26 1979-10-26 Reticle examination method

Publications (2)

Publication Number Publication Date
JPS5662323A JPS5662323A (en) 1981-05-28
JPS6131610B2 true JPS6131610B2 (enrdf_load_stackoverflow) 1986-07-21

Family

ID=15223050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13848079A Granted JPS5662323A (en) 1979-10-26 1979-10-26 Reticle examination method

Country Status (1)

Country Link
JP (1) JPS5662323A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327212U (enrdf_load_stackoverflow) * 1986-07-29 1988-02-23

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5679431A (en) * 1979-12-03 1981-06-30 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor integrated circuit device
JPS58210618A (ja) * 1982-06-02 1983-12-07 Hitachi Ltd 縮小投影露光方法および装置
JPS6216528A (ja) * 1985-07-16 1987-01-24 Hoya Corp Ａｌ膜付き基板
US4637714A (en) * 1985-10-31 1987-01-20 International Business Machines Corporation Inspection system for pellicalized reticles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327212U (enrdf_load_stackoverflow) * 1986-07-29 1988-02-23

Also Published As

Publication number Publication date
JPS5662323A (en) 1981-05-28

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