JPH0214749B2 - - Google Patents

Info

Publication number
JPH0214749B2
JPH0214749B2 JP55184729A JP18472980A JPH0214749B2 JP H0214749 B2 JPH0214749 B2 JP H0214749B2 JP 55184729 A JP55184729 A JP 55184729A JP 18472980 A JP18472980 A JP 18472980A JP H0214749 B2 JPH0214749 B2 JP H0214749B2
Authority
JP
Japan
Prior art keywords
pattern
layer
reticle
reflected light
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55184729A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57108970A (en
Inventor
Takao Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55184729A priority Critical patent/JPS57108970A/ja
Publication of JPS57108970A publication Critical patent/JPS57108970A/ja
Publication of JPH0214749B2 publication Critical patent/JPH0214749B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP55184729A 1980-12-25 1980-12-25 Pattern checking method Granted JPS57108970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55184729A JPS57108970A (en) 1980-12-25 1980-12-25 Pattern checking method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55184729A JPS57108970A (en) 1980-12-25 1980-12-25 Pattern checking method

Publications (2)

Publication Number Publication Date
JPS57108970A JPS57108970A (en) 1982-07-07
JPH0214749B2 true JPH0214749B2 (enrdf_load_stackoverflow) 1990-04-09

Family

ID=16158337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55184729A Granted JPS57108970A (en) 1980-12-25 1980-12-25 Pattern checking method

Country Status (1)

Country Link
JP (1) JPS57108970A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150080768A (ko) * 2014-01-02 2015-07-10 윤성노 Ｌｅｄ 전조등

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6654698B2 (en) 2001-06-12 2003-11-25 Applied Materials, Inc. Systems and methods for calibrating integrated inspection tools

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322370A (en) * 1976-08-13 1978-03-01 Fujitsu Ltd Inspecting method of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150080768A (ko) * 2014-01-02 2015-07-10 윤성노 Ｌｅｄ 전조등

Also Published As

Publication number Publication date
JPS57108970A (en) 1982-07-07

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