JPS6131483Y2 - - Google Patents

Info

Publication number
JPS6131483Y2
JPS6131483Y2 JP20193284U JP20193284U JPS6131483Y2 JP S6131483 Y2 JPS6131483 Y2 JP S6131483Y2 JP 20193284 U JP20193284 U JP 20193284U JP 20193284 U JP20193284 U JP 20193284U JP S6131483 Y2 JPS6131483 Y2 JP S6131483Y2
Authority
JP
Japan
Prior art keywords
electron beam
pedestal
field
moving table
lens frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20193284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60136047U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20193284U priority Critical patent/JPS60136047U/ja
Publication of JPS60136047U publication Critical patent/JPS60136047U/ja
Application granted granted Critical
Publication of JPS6131483Y2 publication Critical patent/JPS6131483Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP20193284U 1984-12-27 1984-12-27 走査電子顕微鏡装置 Granted JPS60136047U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20193284U JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20193284U JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Publications (2)

Publication Number Publication Date
JPS60136047U JPS60136047U (ja) 1985-09-10
JPS6131483Y2 true JPS6131483Y2 (cg-RX-API-DMAC7.html) 1986-09-12

Family

ID=30764178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20193284U Granted JPS60136047U (ja) 1984-12-27 1984-12-27 走査電子顕微鏡装置

Country Status (1)

Country Link
JP (1) JPS60136047U (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS60136047U (ja) 1985-09-10

Similar Documents

Publication Publication Date Title
US4447731A (en) Exterior view examination apparatus
CN108717062A (zh) 一种大口径超精密表面的暗场缺陷检测装置及其测量方法
US4460827A (en) Scanning electron microscope or similar equipment with tiltable microscope column
JPS58500386A (ja) 現場で操作する走査電子顕微鏡
US7202476B2 (en) Charged-particle beam instrument
EP0686994A1 (en) Defect observing electron microscope
JPS6131483Y2 (cg-RX-API-DMAC7.html)
KR100532238B1 (ko) 박판막 검사방법, 이에 사용되는 장치 및 검사시스템
JPH0458622B2 (cg-RX-API-DMAC7.html)
CN1035583A (zh) 移动式电子扫描显微镜
JPH0451441A (ja) パターン検査方法及びその装置
CN205080072U (zh) 一种大截面大厚度红外玻璃内部缺陷检测装置
KR101721550B1 (ko) Sem 또는 stem용 복수시료 장착장치
JPH0464245A (ja) 光学顕微鏡付電子顕微鏡およびそれを用いた外観検査装置
JPS6269527A (ja) 検査装置
JPS5632656A (en) Scanning electron microscope device
JPH04308639A (ja) 走査型電子顕微鏡
JPH0541551Y2 (cg-RX-API-DMAC7.html)
JPS5632658A (en) Scanning type electron microscope
JPH02171642A (ja) 検査方法
JPH01197951A (ja) 走査型電子顕微鏡
JPH03285106A (ja) 表面検査装置
JPH03202758A (ja) 仕上げ加工面の自動探傷装置及び自動探傷方法
JP2529173Y2 (ja) エキソ電子顕微鏡
JPS58158847A (ja) 試験片表面観察装置