JPS6131225Y2 - - Google Patents

Info

Publication number
JPS6131225Y2
JPS6131225Y2 JP1976081233U JP8123376U JPS6131225Y2 JP S6131225 Y2 JPS6131225 Y2 JP S6131225Y2 JP 1976081233 U JP1976081233 U JP 1976081233U JP 8123376 U JP8123376 U JP 8123376U JP S6131225 Y2 JPS6131225 Y2 JP S6131225Y2
Authority
JP
Japan
Prior art keywords
electron gun
chamber
valve
electron
gun chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976081233U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52171726U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976081233U priority Critical patent/JPS6131225Y2/ja
Publication of JPS52171726U publication Critical patent/JPS52171726U/ja
Application granted granted Critical
Publication of JPS6131225Y2 publication Critical patent/JPS6131225Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
JP1976081233U 1976-06-21 1976-06-21 Expired JPS6131225Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976081233U JPS6131225Y2 (enrdf_load_stackoverflow) 1976-06-21 1976-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976081233U JPS6131225Y2 (enrdf_load_stackoverflow) 1976-06-21 1976-06-21

Publications (2)

Publication Number Publication Date
JPS52171726U JPS52171726U (enrdf_load_stackoverflow) 1977-12-27
JPS6131225Y2 true JPS6131225Y2 (enrdf_load_stackoverflow) 1986-09-11

Family

ID=28560716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976081233U Expired JPS6131225Y2 (enrdf_load_stackoverflow) 1976-06-21 1976-06-21

Country Status (1)

Country Link
JP (1) JPS6131225Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS474465U (enrdf_load_stackoverflow) * 1971-02-05 1972-09-11
JPS4718121U (enrdf_load_stackoverflow) * 1971-03-31 1972-10-31
JPS4729617U (enrdf_load_stackoverflow) * 1971-04-21 1972-12-04
JPS5146124U (enrdf_load_stackoverflow) * 1974-10-03 1976-04-05

Also Published As

Publication number Publication date
JPS52171726U (enrdf_load_stackoverflow) 1977-12-27

Similar Documents

Publication Publication Date Title
EP3324422B1 (en) Shutter
US6799394B2 (en) Apparatus for sealing a vacuum chamber
JPS6131225Y2 (enrdf_load_stackoverflow)
US2272843A (en) Electron microscope specimen chamber
JP7530545B2 (ja) 走査型電子顕微鏡用電子銃チャンバー、これを含む電子銃及び走査電子顕微鏡
JPH0610611Y2 (ja) 電子顕微鏡等の試料装置
US9318301B2 (en) Sample introduction device and charged particle beam instrument
JPS61222933A (ja) ガラス製品の成形方法及び装置
JP3394547B2 (ja) マルチステップバルブアクチェータ
JP3091850B2 (ja) 荷電粒子線装置
JP7670770B2 (ja) 真空封止弁
JPH0461727A (ja) 蛍光表示管の排気封止装置
JPH0151543B2 (enrdf_load_stackoverflow)
JP2515669B2 (ja) 真空ポンプ
JPS633085Y2 (enrdf_load_stackoverflow)
JPH0955180A (ja) 電子ビーム装置
JP2001165333A (ja) ゲートバルブ
US2570984A (en) Ambient pressure-responsive clamping means
JPH04368749A (ja) ランプ排気装置
JPS6144645B2 (enrdf_load_stackoverflow)
JPH03268880A (ja) 電子ビーム加工装置
JPH069486Y2 (ja) 電子線露光装置等の材料送り装置
JPS5920750Y2 (ja) 電子銃
JPS59111327A (ja) 試料交換装置
JPH0214198Y2 (enrdf_load_stackoverflow)