JPS6130417B2 - - Google Patents

Info

Publication number
JPS6130417B2
JPS6130417B2 JP52127542A JP12754277A JPS6130417B2 JP S6130417 B2 JPS6130417 B2 JP S6130417B2 JP 52127542 A JP52127542 A JP 52127542A JP 12754277 A JP12754277 A JP 12754277A JP S6130417 B2 JPS6130417 B2 JP S6130417B2
Authority
JP
Japan
Prior art keywords
silicon
etching
gas plasma
aluminum
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52127542A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5461465A (en
Inventor
Osamu Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP12754277A priority Critical patent/JPS5461465A/ja
Publication of JPS5461465A publication Critical patent/JPS5461465A/ja
Publication of JPS6130417B2 publication Critical patent/JPS6130417B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12754277A 1977-10-26 1977-10-26 Method of fabricating semiconductor Granted JPS5461465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12754277A JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12754277A JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Publications (2)

Publication Number Publication Date
JPS5461465A JPS5461465A (en) 1979-05-17
JPS6130417B2 true JPS6130417B2 (Sortimente) 1986-07-14

Family

ID=14962576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12754277A Granted JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Country Status (1)

Country Link
JP (1) JPS5461465A (Sortimente)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238314U (Sortimente) * 1988-09-08 1990-03-14

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142654A (en) * 1980-04-09 1981-11-07 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238314U (Sortimente) * 1988-09-08 1990-03-14

Also Published As

Publication number Publication date
JPS5461465A (en) 1979-05-17

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