JPS61292327A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61292327A
JPS61292327A JP13373785A JP13373785A JPS61292327A JP S61292327 A JPS61292327 A JP S61292327A JP 13373785 A JP13373785 A JP 13373785A JP 13373785 A JP13373785 A JP 13373785A JP S61292327 A JPS61292327 A JP S61292327A
Authority
JP
Japan
Prior art keywords
layer
heat treatment
boron
impurity
lifetime killer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13373785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571131B2 (https=
Inventor
Susumu Sato
進 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13373785A priority Critical patent/JPS61292327A/ja
Publication of JPS61292327A publication Critical patent/JPS61292327A/ja
Publication of JPH0571131B2 publication Critical patent/JPH0571131B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
JP13373785A 1985-06-19 1985-06-19 半導体装置の製造方法 Granted JPS61292327A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13373785A JPS61292327A (ja) 1985-06-19 1985-06-19 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13373785A JPS61292327A (ja) 1985-06-19 1985-06-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61292327A true JPS61292327A (ja) 1986-12-23
JPH0571131B2 JPH0571131B2 (https=) 1993-10-06

Family

ID=15111737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13373785A Granted JPS61292327A (ja) 1985-06-19 1985-06-19 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61292327A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987098A (en) * 1988-08-10 1991-01-22 Fuji Electric Co., Ltd. Method of producing a metal-oxide semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987098A (en) * 1988-08-10 1991-01-22 Fuji Electric Co., Ltd. Method of producing a metal-oxide semiconductor device

Also Published As

Publication number Publication date
JPH0571131B2 (https=) 1993-10-06

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