JPS6129152B2 - - Google Patents
Info
- Publication number
- JPS6129152B2 JPS6129152B2 JP51151065A JP15106576A JPS6129152B2 JP S6129152 B2 JPS6129152 B2 JP S6129152B2 JP 51151065 A JP51151065 A JP 51151065A JP 15106576 A JP15106576 A JP 15106576A JP S6129152 B2 JPS6129152 B2 JP S6129152B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- emitter
- type
- type diffusion
- diffusion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 229910052710 silicon Inorganic materials 0.000 description 27
- 239000010703 silicon Substances 0.000 description 27
- 238000002161 passivation Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/641—Combinations of only vertical BJTs
- H10D84/642—Combinations of non-inverted vertical BJTs of the same conductivity type having different characteristics, e.g. Darlington transistors
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15106576A JPS5374391A (en) | 1976-12-15 | 1976-12-15 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15106576A JPS5374391A (en) | 1976-12-15 | 1976-12-15 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5374391A JPS5374391A (en) | 1978-07-01 |
| JPS6129152B2 true JPS6129152B2 (enrdf_load_stackoverflow) | 1986-07-04 |
Family
ID=15510524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15106576A Granted JPS5374391A (en) | 1976-12-15 | 1976-12-15 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5374391A (enrdf_load_stackoverflow) |
-
1976
- 1976-12-15 JP JP15106576A patent/JPS5374391A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5374391A (en) | 1978-07-01 |
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