JPS61277194A - 薄膜ｅｌ素子の製造方法 - Google Patents

薄膜ｅｌ素子の製造方法

Info

Publication number
JPS61277194A
JPS61277194A JP60118311A JP11831185A JPS61277194A JP S61277194 A JPS61277194 A JP S61277194A JP 60118311 A JP60118311 A JP 60118311A JP 11831185 A JP11831185 A JP 11831185A JP S61277194 A JPS61277194 A JP S61277194A
Authority
JP
Japan
Prior art keywords
thin film
film layer
oxide dielectric
oxide
dielectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60118311A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126159B2 (index.php
Inventor
洋介 藤田
純 桑田
雅博 西川
任田　隆夫
富造 松岡
阿部　惇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60118311A priority Critical patent/JPS61277194A/ja
Publication of JPS61277194A publication Critical patent/JPS61277194A/ja
Publication of JPH0126159B2 publication Critical patent/JPH0126159B2/ja
Granted legal-status Critical Current

Links

JP60118311A 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法 Granted JPS61277194A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60118311A JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60118311A JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61277194A true JPS61277194A (ja) 1986-12-08
JPH0126159B2 JPH0126159B2 (index.php) 1989-05-22

Family

ID=14733534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60118311A Granted JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61277194A (index.php)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593039A (ja) * 1982-06-25 1984-01-09 Nippon Telegr & Teleph Corp <Ntt> フツ化物光フアイバ用ガラスの作製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593039A (ja) * 1982-06-25 1984-01-09 Nippon Telegr & Teleph Corp <Ntt> フツ化物光フアイバ用ガラスの作製方法

Also Published As

Publication number Publication date
JPH0126159B2 (index.php) 1989-05-22

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