JPH0126159B2 - - Google Patents

Info

Publication number
JPH0126159B2
JPH0126159B2 JP60118311A JP11831185A JPH0126159B2 JP H0126159 B2 JPH0126159 B2 JP H0126159B2 JP 60118311 A JP60118311 A JP 60118311A JP 11831185 A JP11831185 A JP 11831185A JP H0126159 B2 JPH0126159 B2 JP H0126159B2
Authority
JP
Japan
Prior art keywords
thin film
film layer
oxide
dielectric thin
oxide dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60118311A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61277194A (ja
Inventor
Yosuke Fujita
Jun Kuwata
Masahiro Nishikawa
Takao Toda
Tomizo Matsuoka
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60118311A priority Critical patent/JPS61277194A/ja
Publication of JPS61277194A publication Critical patent/JPS61277194A/ja
Publication of JPH0126159B2 publication Critical patent/JPH0126159B2/ja
Granted legal-status Critical Current

Links

JP60118311A 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法 Granted JPS61277194A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60118311A JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60118311A JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61277194A JPS61277194A (ja) 1986-12-08
JPH0126159B2 true JPH0126159B2 (index.php) 1989-05-22

Family

ID=14733534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60118311A Granted JPS61277194A (ja) 1985-05-31 1985-05-31 薄膜ｅｌ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61277194A (index.php)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593039A (ja) * 1982-06-25 1984-01-09 Nippon Telegr & Teleph Corp <Ntt> フツ化物光フアイバ用ガラスの作製方法

Also Published As

Publication number Publication date
JPS61277194A (ja) 1986-12-08

Similar Documents

Publication Publication Date Title
EP0111568B1 (en) Thin film electric field light-emitting device
JPS6240837B2 (index.php)
JPH0126159B2 (index.php)
JPH0156517B2 (index.php)
JP3895141B2 (ja) 薄膜ｅｌ素子及びその製造方法
JPS63994A (ja) 薄膜電場発光素子の製造法
JPS6359519B2 (index.php)
JPS58175294A (ja) 薄膜発光素子
JPH0516158B2 (index.php)
JPH0740515B2 (ja) 薄膜発光素子
JPS59228397A (ja) 薄膜発光素子
JP2502560B2 (ja) 誘電体膜の形成方法
JPH046279B2 (index.php)
JPH0634389B2 (ja) 薄膜発光素子の製造法
JPH0124358B2 (index.php)
JPH0353440Y2 (index.php)
JPH01209692A (ja) 薄模ｅｌパネル
JPS6147096A (ja) 薄膜ｅｌ素子の製造方法
JPH04141983A (ja) 薄膜ｅｌ素子
JPH01204394A (ja) 薄膜ｅｌ素子
JPH01255194A (ja) 薄膜ｅｌ素子
JPH0130279B2 (index.php)
JPS62269986A (ja) 薄膜デイスプレイパネルの成膜方法
JPS6199297A (ja) 薄膜ＥＬ素子に於けるＺｎｓ発光層の製造方法
JPH05234679A (ja) 薄膜発光素子