JPS61270378A - エツチング方法 - Google Patents

エツチング方法

Info

Publication number
JPS61270378A
JPS61270378A JP11092585A JP11092585A JPS61270378A JP S61270378 A JPS61270378 A JP S61270378A JP 11092585 A JP11092585 A JP 11092585A JP 11092585 A JP11092585 A JP 11092585A JP S61270378 A JPS61270378 A JP S61270378A
Authority
JP
Japan
Prior art keywords
etching
resistant pattern
etched
base sheet
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11092585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342706B2 (enrdf_load_stackoverflow
Inventor
Yorio Nakaji
中路　順雄
Shoichi Ishihara
石原　正一
Junsuke Oishi
大石　淳介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP11092585A priority Critical patent/JPS61270378A/ja
Publication of JPS61270378A publication Critical patent/JPS61270378A/ja
Publication of JPS6342706B2 publication Critical patent/JPS6342706B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP11092585A 1985-05-23 1985-05-23 エツチング方法 Granted JPS61270378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11092585A JPS61270378A (ja) 1985-05-23 1985-05-23 エツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11092585A JPS61270378A (ja) 1985-05-23 1985-05-23 エツチング方法

Publications (2)

Publication Number Publication Date
JPS61270378A true JPS61270378A (ja) 1986-11-29
JPS6342706B2 JPS6342706B2 (enrdf_load_stackoverflow) 1988-08-25

Family

ID=14548090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11092585A Granted JPS61270378A (ja) 1985-05-23 1985-05-23 エツチング方法

Country Status (1)

Country Link
JP (1) JPS61270378A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6342706B2 (enrdf_load_stackoverflow) 1988-08-25

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