JPS61270167A - 凸形サ−マルヘツドの製造方法 - Google Patents
凸形サ−マルヘツドの製造方法Info
- Publication number
- JPS61270167A JPS61270167A JP60112030A JP11203085A JPS61270167A JP S61270167 A JPS61270167 A JP S61270167A JP 60112030 A JP60112030 A JP 60112030A JP 11203085 A JP11203085 A JP 11203085A JP S61270167 A JPS61270167 A JP S61270167A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resist
- layer
- flexible film
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims abstract description 13
- 238000007772 electroless plating Methods 0.000 claims abstract description 7
- 238000000206 photolithography Methods 0.000 claims abstract description 6
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 238000009713 electroplating Methods 0.000 abstract description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 206010011732 Cyst Diseases 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 241000981595 Zoysia japonica Species 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229940077844 iodine / potassium iodide Drugs 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 210000000689 upper leg Anatomy 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112030A JPS61270167A (ja) | 1985-05-27 | 1985-05-27 | 凸形サ−マルヘツドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60112030A JPS61270167A (ja) | 1985-05-27 | 1985-05-27 | 凸形サ−マルヘツドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61270167A true JPS61270167A (ja) | 1986-11-29 |
| JPH0479309B2 JPH0479309B2 (enrdf_load_stackoverflow) | 1992-12-15 |
Family
ID=14576243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60112030A Granted JPS61270167A (ja) | 1985-05-27 | 1985-05-27 | 凸形サ−マルヘツドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61270167A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6268769A (ja) * | 1985-09-20 | 1987-03-28 | Fuji Xerox Co Ltd | 曲面型サ−マルヘツドおよびその製造方法 |
| JPH01119345U (enrdf_load_stackoverflow) * | 1988-02-08 | 1989-08-11 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772874A (en) * | 1980-10-24 | 1982-05-07 | Mitsubishi Electric Corp | Thermal head and preparation thereof |
| JPS57185173A (en) * | 1981-05-11 | 1982-11-15 | Oki Electric Ind Co Ltd | Thermal head |
-
1985
- 1985-05-27 JP JP60112030A patent/JPS61270167A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5772874A (en) * | 1980-10-24 | 1982-05-07 | Mitsubishi Electric Corp | Thermal head and preparation thereof |
| JPS57185173A (en) * | 1981-05-11 | 1982-11-15 | Oki Electric Ind Co Ltd | Thermal head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6268769A (ja) * | 1985-09-20 | 1987-03-28 | Fuji Xerox Co Ltd | 曲面型サ−マルヘツドおよびその製造方法 |
| JPH01119345U (enrdf_load_stackoverflow) * | 1988-02-08 | 1989-08-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479309B2 (enrdf_load_stackoverflow) | 1992-12-15 |
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