JPS61268442A - 多層構造の耐熱容器 - Google Patents

多層構造の耐熱容器

Info

Publication number
JPS61268442A
JPS61268442A JP60111246A JP11124685A JPS61268442A JP S61268442 A JPS61268442 A JP S61268442A JP 60111246 A JP60111246 A JP 60111246A JP 11124685 A JP11124685 A JP 11124685A JP S61268442 A JPS61268442 A JP S61268442A
Authority
JP
Japan
Prior art keywords
heat
density
layer
resistant container
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60111246A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548176B2 (en, 2012
Inventor
芳宏 久保田
柳澤 勲
良二 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP60111246A priority Critical patent/JPS61268442A/ja
Priority to US06/885,880 priority patent/US4775565A/en
Publication of JPS61268442A publication Critical patent/JPS61268442A/ja
Publication of JPH0548176B2 publication Critical patent/JPH0548176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details specially adapted for crucible or pot furnaces
    • F27B14/10Crucibles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/13Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1317Multilayer [continuous layer]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/24992Density or compression of components

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Products (AREA)
  • Physical Vapour Deposition (AREA)
JP60111246A 1985-05-23 1985-05-23 多層構造の耐熱容器 Granted JPS61268442A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60111246A JPS61268442A (ja) 1985-05-23 1985-05-23 多層構造の耐熱容器
US06/885,880 US4775565A (en) 1985-05-23 1986-07-15 Vessel for refractory use having multi-layered wall

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60111246A JPS61268442A (ja) 1985-05-23 1985-05-23 多層構造の耐熱容器

Publications (2)

Publication Number Publication Date
JPS61268442A true JPS61268442A (ja) 1986-11-27
JPH0548176B2 JPH0548176B2 (en, 2012) 1993-07-20

Family

ID=14556293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60111246A Granted JPS61268442A (ja) 1985-05-23 1985-05-23 多層構造の耐熱容器

Country Status (2)

Country Link
US (1) US4775565A (en, 2012)
JP (1) JPS61268442A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011020919A (ja) * 2009-07-15 2011-02-03 Schott Ag ガラス溶融物からガラス製品を生産する方法および装置
JP2014093410A (ja) * 2012-11-02 2014-05-19 Tokyo Electron Ltd 縦型熱処理装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4030540C1 (en, 2012) * 1990-09-27 1991-11-28 Erno Raumfahrttechnik Gmbh, 2800 Bremen, De
US5394932A (en) * 1992-01-17 1995-03-07 Howmet Corporation Multiple part cores for investment casting
US6670025B2 (en) * 2001-05-24 2003-12-30 General Electric Company Pyrolytic boron nitride crucible and method
US6960741B2 (en) 2002-08-26 2005-11-01 Lexmark International, Inc. Large area alumina ceramic heater
DE102009033501B4 (de) * 2009-07-15 2016-07-21 Schott Ag Verfahren und Vorrichtung zum kontinuierlichen Schmelzen oder Läutern von Schmelzen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095307A (en, 2012) * 1973-12-20 1975-07-29

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3491992A (en) * 1964-10-06 1970-01-27 Leybold Heraeus Gmbh & Co Kg Vaporizing crucible
US3724996A (en) * 1971-03-12 1973-04-03 Union Carbide Corp Boron nitride containing vessel having a surface coating of zirconium silicon
US3931438A (en) * 1971-11-08 1976-01-06 Corning Glass Works Differential densification strengthening of glass-ceramics
US3911188A (en) * 1973-07-09 1975-10-07 Norton Co High strength composite ceramic structure
US4552800A (en) * 1979-03-02 1985-11-12 Blasch Precision Ceramics, Inc. Composite inorganic structures
US4492765A (en) * 1980-08-15 1985-01-08 Gte Products Corporation Si3 N4 ceramic articles having lower density outer layer, and method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095307A (en, 2012) * 1973-12-20 1975-07-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011020919A (ja) * 2009-07-15 2011-02-03 Schott Ag ガラス溶融物からガラス製品を生産する方法および装置
JP2015129093A (ja) * 2009-07-15 2015-07-16 ショット アクチエンゲゼルシャフトSchott AG ガラス溶融物からガラス製品を生産する方法および装置
JP2014093410A (ja) * 2012-11-02 2014-05-19 Tokyo Electron Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0548176B2 (en, 2012) 1993-07-20
US4775565A (en) 1988-10-04

Similar Documents

Publication Publication Date Title
EP0149044B1 (en) Boron nitride containing titanium nitride, method of producing the same and composite ceramics produced therefrom
EP0119250B1 (en) Self protecting carbon bodies and method for making same
JPS5919192B2 (ja) 金属蒸発の為の熱分解窒化硼素被覆ボ−ト
JP2520060B2 (ja) 窒化硼素製るつぼ及びそれを製造するための方法
US5360638A (en) Process for the production of a carbon-containing composite material part protected against oxidation
Diefendorf The deposition of pyrolytic graphite
JP2548949B2 (ja) 半導体製造用構成部材
JPS5954697A (ja) 炭化ケイ素単結晶の製造方法
US3986822A (en) Boron nitride crucible
JPS61268442A (ja) 多層構造の耐熱容器
US4058579A (en) Process for producing an improved boron nitride crucible
Besmann et al. Chemical vapor deposition techniques
CN1047209C (zh) 高密度闪蒸器
Leipold et al. Materials of construction for silicon crystal growth
JPH0688866B2 (ja) 窒化ホウ素被覆ルツボおよびその製造方法
JPS62176981A (ja) 窒化ホウ素被覆ルツボ
CN208167094U (zh) 一种多层坩埚
JPH0784357B2 (ja) 窒化ホウ素被覆ルツボ
JPH0375508B2 (en, 2012)
JPS61236672A (ja) 熱分解窒化ホウ素被覆物品及びその製法
JPH083144B2 (ja) 熱分解窒化ほう素容器
JPH07153370A (ja) 放電管
JPH07147277A (ja) 半導体用部材
JP2687354B2 (ja) SiC被膜を有するポリシリコン部材の製造方法
JPS61219787A (ja) 高純度半導体単結晶製造用ルツボ

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term