JPS61268311A - レジスト液用濾過装置 - Google Patents

レジスト液用濾過装置

Info

Publication number
JPS61268311A
JPS61268311A JP60108007A JP10800785A JPS61268311A JP S61268311 A JPS61268311 A JP S61268311A JP 60108007 A JP60108007 A JP 60108007A JP 10800785 A JP10800785 A JP 10800785A JP S61268311 A JPS61268311 A JP S61268311A
Authority
JP
Japan
Prior art keywords
container
liquid
filter
resist
filtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60108007A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520125B2 (enExample
Inventor
Takao Higuchi
孝雄 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP60108007A priority Critical patent/JPS61268311A/ja
Publication of JPS61268311A publication Critical patent/JPS61268311A/ja
Publication of JPH0520125B2 publication Critical patent/JPH0520125B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtration Of Liquid (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP60108007A 1985-05-20 1985-05-20 レジスト液用濾過装置 Granted JPS61268311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60108007A JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60108007A JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Publications (2)

Publication Number Publication Date
JPS61268311A true JPS61268311A (ja) 1986-11-27
JPH0520125B2 JPH0520125B2 (enExample) 1993-03-18

Family

ID=14473621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60108007A Granted JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Country Status (1)

Country Link
JP (1) JPS61268311A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0294517A (ja) * 1988-09-30 1990-04-05 Tokyo Electron Ltd レジスト処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5161072A (en) * 1974-11-25 1976-05-27 Nippon Kokan Kk Kyusokurokakino seigyohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5161072A (en) * 1974-11-25 1976-05-27 Nippon Kokan Kk Kyusokurokakino seigyohoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0294517A (ja) * 1988-09-30 1990-04-05 Tokyo Electron Ltd レジスト処理装置

Also Published As

Publication number Publication date
JPH0520125B2 (enExample) 1993-03-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term