JPS6126364Y2 - - Google Patents
Info
- Publication number
- JPS6126364Y2 JPS6126364Y2 JP1982019882U JP1988282U JPS6126364Y2 JP S6126364 Y2 JPS6126364 Y2 JP S6126364Y2 JP 1982019882 U JP1982019882 U JP 1982019882U JP 1988282 U JP1988282 U JP 1988282U JP S6126364 Y2 JPS6126364 Y2 JP S6126364Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- shield plate
- evaporation source
- jacket
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 238000001704 evaporation Methods 0.000 claims description 16
- 230000008020 evaporation Effects 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988282U JPS58124467U (ja) | 1982-02-17 | 1982-02-17 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988282U JPS58124467U (ja) | 1982-02-17 | 1982-02-17 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58124467U JPS58124467U (ja) | 1983-08-24 |
| JPS6126364Y2 true JPS6126364Y2 (US20110009641A1-20110113-C00256.png) | 1986-08-07 |
Family
ID=30032070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988282U Granted JPS58124467U (ja) | 1982-02-17 | 1982-02-17 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58124467U (US20110009641A1-20110113-C00256.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6073216U (ja) * | 1983-10-25 | 1985-05-23 | 太陽誘電株式会社 | 磁性膜作製装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915356A (US20110009641A1-20110113-C00256.png) * | 1972-05-18 | 1974-02-09 | ||
| JPS5540597B2 (US20110009641A1-20110113-C00256.png) * | 1975-02-10 | 1980-10-18 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5737473Y2 (US20110009641A1-20110113-C00256.png) * | 1978-09-11 | 1982-08-18 |
-
1982
- 1982-02-17 JP JP1988282U patent/JPS58124467U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915356A (US20110009641A1-20110113-C00256.png) * | 1972-05-18 | 1974-02-09 | ||
| JPS5540597B2 (US20110009641A1-20110113-C00256.png) * | 1975-02-10 | 1980-10-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58124467U (ja) | 1983-08-24 |
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