JPS61263503A - 清浄化装置 - Google Patents

清浄化装置

Info

Publication number
JPS61263503A
JPS61263503A JP10430085A JP10430085A JPS61263503A JP S61263503 A JPS61263503 A JP S61263503A JP 10430085 A JP10430085 A JP 10430085A JP 10430085 A JP10430085 A JP 10430085A JP S61263503 A JPS61263503 A JP S61263503A
Authority
JP
Japan
Prior art keywords
transport
cassette
arm
section
stored
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10430085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055722B2 (esLanguage
Inventor
Hiromi Kumagai
熊谷　浩洋
Tamio Endo
民夫 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP10430085A priority Critical patent/JPS61263503A/ja
Publication of JPS61263503A publication Critical patent/JPS61263503A/ja
Publication of JPH055722B2 publication Critical patent/JPH055722B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP10430085A 1985-05-16 1985-05-16 清浄化装置 Granted JPS61263503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10430085A JPS61263503A (ja) 1985-05-16 1985-05-16 清浄化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10430085A JPS61263503A (ja) 1985-05-16 1985-05-16 清浄化装置

Publications (2)

Publication Number Publication Date
JPS61263503A true JPS61263503A (ja) 1986-11-21
JPH055722B2 JPH055722B2 (esLanguage) 1993-01-25

Family

ID=14377071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10430085A Granted JPS61263503A (ja) 1985-05-16 1985-05-16 清浄化装置

Country Status (1)

Country Link
JP (1) JPS61263503A (esLanguage)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH0624508A (ja) * 1992-04-08 1994-02-01 Murata Mach Ltd クリーンルーム用収納庫
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6370124B2 (ja) 2014-06-18 2018-08-08 キヤノン株式会社 画像処理装置、画像処理装置の制御方法、及びプログラム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH0624508A (ja) * 1992-04-08 1994-02-01 Murata Mach Ltd クリーンルーム用収納庫
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions

Also Published As

Publication number Publication date
JPH055722B2 (esLanguage) 1993-01-25

Similar Documents

Publication Publication Date Title
KR930011156A (ko) 기판반송장치
JP3832295B2 (ja) 荷取り扱い設備
JPH0131298B2 (esLanguage)
JPH10256346A (ja) カセット搬出入機構及び半導体製造装置
JPS61263503A (ja) 清浄化装置
JP3941359B2 (ja) 被処理体の処理システム
JPH1179388A (ja) ガラス類枚葉処理装置
JPS61263502A (ja) 清浄化装置
JPS62136365A (ja) ポリシング装置
JP4019675B2 (ja) 搬送装置
JPH05178413A (ja) ストッカ
JPH04233747A (ja) キャリアストッカ
JPS63244856A (ja) ウエハボ−トの移送装置
JPH0415714Y2 (esLanguage)
JPS62136364A (ja) ポリシヤ−におけるワ−ク搬入出装置
JPS63185704A (ja) 搬送用ハンドリング装置
JP2679284B2 (ja) 天井走行車
JP3205525B2 (ja) 基板の取出装置，搬入装置及び取出搬入装置
JPH0940112A (ja) 薄型基板搬送装置
JPH0282618A (ja) 半導体基板の処理装置
JP2517711B2 (ja) ウエ−ハサンプリング装置
JP2000051801A (ja) 自動洗浄装置
JPH0648847Y2 (ja) 縦型プラズマ処理機のウエハー搬送装置
JPH06134642A (ja) 棒材搬出入装置
JPH04184927A (ja) ウエハのクリーニングシステム