JPS61263150A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61263150A
JPS61263150A JP61002214A JP221486A JPS61263150A JP S61263150 A JPS61263150 A JP S61263150A JP 61002214 A JP61002214 A JP 61002214A JP 221486 A JP221486 A JP 221486A JP S61263150 A JPS61263150 A JP S61263150A
Authority
JP
Japan
Prior art keywords
region
vertical transistor
layer
collector
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61002214A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431189B2 (enExample
Inventor
Hiroshi Iwasaki
博 岩崎
Osamu Ozawa
尾沢　修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61002214A priority Critical patent/JPS61263150A/ja
Publication of JPS61263150A publication Critical patent/JPS61263150A/ja
Publication of JPH0431189B2 publication Critical patent/JPH0431189B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Bipolar Integrated Circuits (AREA)
JP61002214A 1986-01-10 1986-01-10 半導体装置の製造方法 Granted JPS61263150A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61002214A JPS61263150A (ja) 1986-01-10 1986-01-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61002214A JPS61263150A (ja) 1986-01-10 1986-01-10 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3669777A Division JPS53121587A (en) 1977-03-31 1977-03-31 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS61263150A true JPS61263150A (ja) 1986-11-21
JPH0431189B2 JPH0431189B2 (enExample) 1992-05-25

Family

ID=11523100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61002214A Granted JPS61263150A (ja) 1986-01-10 1986-01-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61263150A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278866A (ja) * 1989-04-20 1990-11-15 Sanyo Electric Co Ltd 半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160177A (en) * 1974-09-03 1976-05-25 Western Electric Co Handotaisochi oyobi sonoseizohoho
JPS52104083A (en) * 1976-02-27 1977-09-01 Toshiba Corp Semiconductor unit
JPS52151575A (en) * 1976-04-12 1977-12-16 Texas Instruments Inc Semiconductor i2l circuit and method of producing same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160177A (en) * 1974-09-03 1976-05-25 Western Electric Co Handotaisochi oyobi sonoseizohoho
JPS52104083A (en) * 1976-02-27 1977-09-01 Toshiba Corp Semiconductor unit
JPS52151575A (en) * 1976-04-12 1977-12-16 Texas Instruments Inc Semiconductor i2l circuit and method of producing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278866A (ja) * 1989-04-20 1990-11-15 Sanyo Electric Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0431189B2 (enExample) 1992-05-25

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