JPS61261286A - 半導体装置用基板の製造方法 - Google Patents

半導体装置用基板の製造方法

Info

Publication number
JPS61261286A
JPS61261286A JP60101923A JP10192385A JPS61261286A JP S61261286 A JPS61261286 A JP S61261286A JP 60101923 A JP60101923 A JP 60101923A JP 10192385 A JP10192385 A JP 10192385A JP S61261286 A JPS61261286 A JP S61261286A
Authority
JP
Japan
Prior art keywords
semiconductor film
crystal grains
ion implantation
epitaxial growth
channeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60101923A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580438B2 (enExample
Inventor
Atsushi Ogura
厚志 小椋
Koji Egami
江上　浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60101923A priority Critical patent/JPS61261286A/ja
Publication of JPS61261286A publication Critical patent/JPS61261286A/ja
Publication of JPH0580438B2 publication Critical patent/JPH0580438B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP60101923A 1985-05-14 1985-05-14 半導体装置用基板の製造方法 Granted JPS61261286A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60101923A JPS61261286A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60101923A JPS61261286A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS61261286A true JPS61261286A (ja) 1986-11-19
JPH0580438B2 JPH0580438B2 (enExample) 1993-11-09

Family

ID=14313431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60101923A Granted JPS61261286A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS61261286A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5627086A (en) * 1992-12-10 1997-05-06 Sony Corporation Method of forming thin-film single crystal for semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5627086A (en) * 1992-12-10 1997-05-06 Sony Corporation Method of forming thin-film single crystal for semiconductor

Also Published As

Publication number Publication date
JPH0580438B2 (enExample) 1993-11-09

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