JPS6125246Y2 - - Google Patents

Info

Publication number
JPS6125246Y2
JPS6125246Y2 JP11769078U JP11769078U JPS6125246Y2 JP S6125246 Y2 JPS6125246 Y2 JP S6125246Y2 JP 11769078 U JP11769078 U JP 11769078U JP 11769078 U JP11769078 U JP 11769078U JP S6125246 Y2 JPS6125246 Y2 JP S6125246Y2
Authority
JP
Japan
Prior art keywords
boat
wafer
electrode
reaction tube
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11769078U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5534666U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11769078U priority Critical patent/JPS6125246Y2/ja
Publication of JPS5534666U publication Critical patent/JPS5534666U/ja
Application granted granted Critical
Publication of JPS6125246Y2 publication Critical patent/JPS6125246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11769078U 1978-08-30 1978-08-30 Expired JPS6125246Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11769078U JPS6125246Y2 (enrdf_load_stackoverflow) 1978-08-30 1978-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11769078U JPS6125246Y2 (enrdf_load_stackoverflow) 1978-08-30 1978-08-30

Publications (2)

Publication Number Publication Date
JPS5534666U JPS5534666U (enrdf_load_stackoverflow) 1980-03-06
JPS6125246Y2 true JPS6125246Y2 (enrdf_load_stackoverflow) 1986-07-29

Family

ID=29071364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11769078U Expired JPS6125246Y2 (enrdf_load_stackoverflow) 1978-08-30 1978-08-30

Country Status (1)

Country Link
JP (1) JPS6125246Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069190B2 (ja) * 1986-08-19 1994-02-02 東京エレクトロン株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPS5534666U (enrdf_load_stackoverflow) 1980-03-06

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