JPS61250505A - 穴位置検知装置 - Google Patents
穴位置検知装置Info
- Publication number
- JPS61250505A JPS61250505A JP60091900A JP9190085A JPS61250505A JP S61250505 A JPS61250505 A JP S61250505A JP 60091900 A JP60091900 A JP 60091900A JP 9190085 A JP9190085 A JP 9190085A JP S61250505 A JPS61250505 A JP S61250505A
- Authority
- JP
- Japan
- Prior art keywords
- light
- detected
- hole
- optical fiber
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 claims abstract description 75
- 238000001514 detection method Methods 0.000 claims description 80
- 238000000034 method Methods 0.000 abstract description 8
- 239000000835 fiber Substances 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manipulator (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Geophysics And Detection Of Objects (AREA)
- Light Guides In General And Applications Therefor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60091900A JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60091900A JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61250505A true JPS61250505A (ja) | 1986-11-07 |
JPH0352883B2 JPH0352883B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-13 |
Family
ID=14039441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60091900A Granted JPS61250505A (ja) | 1985-04-29 | 1985-04-29 | 穴位置検知装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61250505A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112259A (ja) * | 1988-10-21 | 1990-04-24 | Shin Etsu Handotai Co Ltd | オリエンテーションフラット・マークの位置検出装置 |
JPH02306109A (ja) * | 1989-05-19 | 1990-12-19 | Hamamatsu Photonics Kk | 3次元位置認識装置 |
US5444536A (en) * | 1992-04-28 | 1995-08-22 | Mtu Motoren- Und Turbinen-Union Muenchen Gmbh | Apparatus for measuring the curvature of a profile, such as an edge of a turbine blade |
US5570186A (en) * | 1992-04-28 | 1996-10-29 | Mtu Motoren- Und Turbinen-Union Munich Gmbh | Method for inspecting the curvature of a profile, such an edge of a turbine blade |
CN111381291A (zh) * | 2018-12-28 | 2020-07-07 | 四川省绵阳西南自动化研究所 | 一种光纤式弹药盒缺弹检测机构 |
-
1985
- 1985-04-29 JP JP60091900A patent/JPS61250505A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112259A (ja) * | 1988-10-21 | 1990-04-24 | Shin Etsu Handotai Co Ltd | オリエンテーションフラット・マークの位置検出装置 |
JPH02306109A (ja) * | 1989-05-19 | 1990-12-19 | Hamamatsu Photonics Kk | 3次元位置認識装置 |
US5444536A (en) * | 1992-04-28 | 1995-08-22 | Mtu Motoren- Und Turbinen-Union Muenchen Gmbh | Apparatus for measuring the curvature of a profile, such as an edge of a turbine blade |
US5570186A (en) * | 1992-04-28 | 1996-10-29 | Mtu Motoren- Und Turbinen-Union Munich Gmbh | Method for inspecting the curvature of a profile, such an edge of a turbine blade |
CN111381291A (zh) * | 2018-12-28 | 2020-07-07 | 四川省绵阳西南自动化研究所 | 一种光纤式弹药盒缺弹检测机构 |
Also Published As
Publication number | Publication date |
---|---|
JPH0352883B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-13 |
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