1245877 狄、發明說明： 【發明所屬之技術領域】 本發明係關於-種利用位置感測器平板所建立之工具機 里及m ’特別是指一種利用位置感測器經由雷射光照射時 會產生二維的訊號的原理，將多個位置感應器放置平板上構 成位置感應器平板，再將位置感應器平板擺放於工具機平 口’而§雷射光照射位置感應器，即可產生多組二維訊號， 这些訊號經過轉換及計算即可得到幾何誤差及定位重複性。 【先前技術】 按’目珂習用之工具機’將—剛體置於該工具機的平台 移動時’在空間中即會產生六個自由度誤差，包括三個線: 誤差（Δχ、Ay、Λζ)與三個角度誤差（俯仰、搖擺、橫轉誤 差），應此加工出來的產品精度及品質會受到六個自由度的 誤差㈣’所以需要有六自由度的量測裝置來調整、定位及 控制 然而，近幾年來工具機的加q朝向微小化、精密化盘 奈米級的技術發展’工具機的加工精密度會直接影響產品產 出的品質，因此，該工具機的精度，往往都需要配合高精密 的量測設備，方可使工具機的精度大大提昇。 由此可見，上述習用物品仍有諸多缺失，實非一良善之 設計者，而亟待加以改良。 本案發明人鑑於上述習用之卫具機量測裝置所衍生的各 1245877 源夾治具卜而該雷射光源夾具1具有-個以上可發出光源 的雷射光源13’於本發中係以二個雷射光源13為例說明， 而且除雷射光源之外，亦可使用可見光、微波、紅外光、紫 卜光及X射線等’且此光源係可由一位置感測器平板2所具 有的各位置感測器21 }妾收，進而量測出其距離。而位置感 測窃’可採用雷射四象儀或電荷耦合器等位置感測器。 /田射光源夾治具1，其係由一垂直於地面的第一桿件 人平仃於地面的第二桿件丨2相接而形成—倒丁字形 悲，且該第二桿# i 2係、為一矩形冑，並在第二桿件K之表 面設有一個以上的容置孔121，以供一可提供固定波長之雷 射光束的雷射光源1 3容置。 邊位置感測器平板2與該雷射光源夾治具"目對之面， 平均分沛的設有一傾以上的位置感測器21，而各位置感測器 21係可接收由雷射光源13所射出的雷射光束，且各位置感 應器J1會因雷射入射位置不同而產生不同的二維訊號，而 可计异工具機（圖中未示）的幾何誤差及定位重複性。 且本务明之里測裝置的原理是採用二維位置感測器，將 多組位置感測器21裝置在位置感測器平板2 i，並將該位 置感測器平板2放置工具機平台上’將每一個位置感測器21 的訊號線接到訊號處理器（圖中未示），並將訊號處理器的 輸出接到類比/數位卡，最後透過電腦（PC)擷取訊號。 1245877 由於谷置各雷射光源13的雷射光源夾治具1固定在工具 機旋轉軸刀夾上，當該工具機平台上的位置感應器21受到 雷射光源13照射時，會產生一組二維訊號，即是雷射光源 1 3在此位置感應器2丨的位置訊號，而該位置感應器平板2 g ,爆於#測刖’必須先經過校正，且經過校正的位置感應器 心板，2 ▼以將每顆位置感應 21的擺設誤差消除，且賦予 個位置感應器21可以提供位置感應器平板2上的座標位置 之能力。 (1 )位置感應器平板校正： 將其中-顆位置感應器21原點定義為位置感應器平板2 的座標原點’其他位置感應器21的座標位置均以相對於此 位置感應器21座標位置來定義。將位置感應器平板2的校 正分成X轴校正與Y軸校正兩次，再⑼校正時，將工具機 平台往X軸方向移動數次，並將每次移動時的各位置感應器 2"頓取訊號與工具機移動座標紀錄下來，最後將所得之各位 二感應器21擷取之訊號與其相對應的卫具機移動座標透過 最小平方法即可算出位置感測器2 J命“之X軸校正曲線，以同 樣方式將平台沿Y軸移動並擷取 • 罝執應為21訊號與工 具機移動座標紀錄，如此透過最小 十方法可以的到Y軸的校 正取線。 (2)重複性測試： ^45877 將该工具機之平台 晋、，上心 、.己碌该工具機之平台的位 置，亚记錄各位置感應器21之位 置的讯5虎，將紀錄的各位 置感應器21訊號透過校正曲線 ,,^ 即可得到該工具機 的貫際位置。如此將1平A看递梦* 八城 千口重複移動於多點之間，再將所得 之一維訊號經過轉換及計算， 』侍至j千台之定位重複性。 (3)幾何誤差量測： 在幾何誤差方面將量測路徑 一 ^ ~ 口裡，如弟二圖所 不，將該雷射光源夾治具沿z轴1245877 D. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a machine tool built using a position sensor tablet and m ', especially a type of sensor that is generated when a position sensor is irradiated with laser light. The principle of the two-dimensional signal, multiple position sensors are placed on the plate to form a position sensor plate, and then the position sensor plate is placed on the flat port of the machine tool ', and § laser light is irradiated to the position sensor to generate multiple sets of two Dimensional signals. These signals can be converted and calculated to obtain geometric errors and positioning repeatability. [Prior technology] According to the "machine tool used by Mu Ke", when a rigid body is placed on the platform of the machine tool, six degrees of freedom errors will be generated in space, including three lines: Error (Δχ, Ay, Λζ ) And three angle errors (pitch, roll, roll error), the accuracy and quality of the product processed by this will be subject to an error of six degrees of freedom ㈣ 'Therefore, a measurement device with six degrees of freedom is required to adjust, position and Control However, in recent years, the increase in q of machine tools has been toward the development of miniaturization and precision disk nano-level technology. The processing precision of machine tools will directly affect the quality of product output. Therefore, the accuracy of this machine tool is often Need to cooperate with high-precision measurement equipment, so that the accuracy of machine tools can be greatly improved. It can be seen that there are still many shortcomings in the above-mentioned conventional articles, and they are not a good designer. They need to be improved. In view of the 1245877 source clips derived from the conventional measuring device of the safety machine, the inventor of this case has one or more laser light sources 13 'which can emit light sources. The laser light source 13 is taken as an example, and in addition to the laser light source, visible light, microwave, infrared light, purple light, X-ray, etc. can also be used. And this light source can be provided by a position sensor plate 2 Each position sensor 21 is closed, and the distance is measured. The position detection can be a position sensor such as a laser imager or a charge coupler. / 田 射 光光 管 1, which is formed by a first rod member perpendicular to the ground and a second rod member 仃 2 connected to the ground—an inverted T-shaped tragedy, and the second rod # i Series 2 is a rectangular cymbal, and has more than one accommodating hole 121 on the surface of the second rod K for receiving a laser light source 13 that can provide a laser beam with a fixed wavelength. The side position sensor plate 2 and the laser light source fixture "are facing each other, and a position sensor 21 with a tilt of more than one inclination is provided evenly, and each position sensor 21 can receive a laser beam. The laser beam emitted from the light source 13 and each position sensor J1 will generate different two-dimensional signals due to different laser incident positions, and can account for geometric errors and positioning repeatability of a machine tool (not shown). In addition, the principle of the in-line measuring device is to use a two-dimensional position sensor, and install multiple sets of position sensors 21 on the position sensor plate 2 i, and place the position sensor plate 2 on the machine tool platform. 'Connect the signal line of each position sensor 21 to a signal processor (not shown), and connect the output of the signal processor to an analog / digital card, and finally capture the signal through a computer (PC). 1245877 Since the laser light source clamping fixture 1 of each laser light source 13 is fixed on the rotary tool holder of the machine tool, when the position sensor 21 on the machine tool platform is illuminated by the laser light source 13, a set of The two-dimensional signal is the position signal of the laser light source 1 3 at this position sensor 2 丨, and the position sensor plate 2 g, which bursts to # 测 刖 'must be corrected first, and the corrected position sensor core Plate, 2 ▼ to eliminate the positioning error of each position sensor 21, and give each position sensor 21 the ability to provide the coordinate position on the position sensor plate 2. (1) Calibration of the position sensor plate: Define the origin of one of the position sensor 21 as the origin of the coordinates of the position sensor plate 2 'The coordinates of the other position sensors 21 are relative to the position of the position sensor 21 To define. The correction of the position sensor plate 2 is divided into X-axis correction and Y-axis correction twice, and then, when the correction is performed, the machine tool platform is moved several times in the X-axis direction, and each position sensor 2 " Take the signal and the machine tool's mobile coordinates and record them. Finally, use the least square method to calculate the X-axis of the position sensor 2 J-life. Correct the curve, and move the platform along the Y axis in the same way and capture it. • The sensor should record the coordinates of the 21 signal and the movement of the machine tool, so that the Y axis can be calibrated through the minimum ten methods. (2) Repeatability test : ^ 45877 The position of the machine tool's platform will be upgraded to the position of the machine tool, the position of the position sensor 21 will be recorded, and the position of the position sensor 21 will be recorded. The signal of each position sensor 21 will be recorded. Through the calibration curve, ^ can get the cross position of the machine. In this way, 1 level A looks at the dream * Eight cities and thousands of mouths are repeatedly moved between multiple points, and then one of the obtained dimensional signals is converted and calculated. Serving to the position of j Qiantai The complex of (3) measuring the amount of geometric error: error in terms of the geometry of a measuring path ^ ~ mouth, as FIG brother two do not, the laser light source along the z-axis fixtures
竿由十仃下降，如圖二（A)之A —B 路徑，此時各位置感應器21可 、(出Z軸的線性誤差 度誤差；同理在C — D路徑也可量 及角 、J出Z軸的線性誤差及角度 誤差；在將該雷射光源夹治具丨沿χ . 孕平仃移動，如圖二（A ) 之B-C路徑此時各位置感應器 J里列出X軸的線性誤 差及角度誤差；同理在D-A路徑也可旦 里測出X軸的線性誤差 及角度誤在將該雷射光源夾治呈 " i /口 γ軸平行移動，如圖二 (Β)之B-C路徑，此時位置感應器21 里測出Υ軸的線性誤 及角度誤差；同理在D-A路經也可量 幻出Υ軸的線性誤差 及角度誤差。 〈動作說明〉 (1)位置感應器平板校正： 射 將該雷射光源夾治具1 光源夾治具1之雷射光源 固疋於工具機之主軸上，並將雷 13射入其中—顆位置感應器21 10 1245877 原點’將此點定義為位置感應 丁攸Z的座標原點，再將工 具機往X軸方向移動數+ 數—人，亚且擷取位置感應器21之訊號 與紀錄工具機移動座標，將位 次應為21之訊號與工具機 移動座標做最小平方法即可， P 了求付位置感應器平板2X軸的校 正曲線，依此方法將工呈德 ”枝在Y轴移動即可求得位置感應器 千板2Υ軸的校正曲線，其流程圖如第三圖所示。 (2 )重複性測試： 在進行重複性測試時，於太眚 於本貫知例中係以一組雷射光源 13，並设定四個位置感應器21 91 ^ / 马例况明，且各位置感應器 21 係以（2卜1、21-2、21-3 及 - T y d 4)表不，而當該工具機之 平台移動時，雷射光原13之 一 射光必須停留的位置如第四 圖所示，然後將雷射光源13 所射出的光點，移動到位置感 應器21 ( 21 -1 )上，掊荽钬铱丁门 ^ ）上接者依弟五圖所示之流程_取資料。一 般的重複性測試會經過五次以上、^ 」柳以冽喊出工具機移 動時重複性是否良好。對於工呈 ，、氣重複性的评估，可以利用 、、先計方法，計算出其定位平均值及標準差。 (3)幾何誤差量測： 在幾何誤差方面，將位置戍庫 泳應為千板1及雷射光源21 逐立在沒有擺設誤差的情形下。 旦依位置感應器平板2的擺設方式，請參閱第三圖所示。 1245877 量測路徑II、量測路徑 順序移動；在移動時各位 誤差。其流程如第六圖所 Ιπ、量測路徑IV也依照 置感應器21將顯示出量測的幾何 不 〇 【特點及功效】 本發明所提供之一插刹田w 種利用位置感測器平板所建立之 具機Ϊ測裝置，其各位置咸 置戊測杰、一般依測量為度分為，1D及 2D ’ 2D-位置感應器受到雷 一 又刮田射先源的照射時，其會產生一系 二維的訊號’這一組二維訊號可以表示此雷射在位置❹: 上的座標位置，但由於每個位置感應器只能供應-小段範圍 的座標’故可利用多個位置感應器與平板來做量測裂置之調 整與定位，其價錢便宜、竿 、 木σ又方便且可以達到高精密度目標。 上列詳細說明係針對本發 " 〜3之可仃貫施例之具體說 月’惟該實施例並非用 限制本务明之專利範圍，凡未脫離 本發明技藝精神所為之等对眚 寺效貫她或變更，均應包含於本案之 i 專利範圍中。 〃 综上所述，本案不但在空間型態上確屬創新，並能較習 用物品增進上述多項功效，應已充分符合新穎性及進步性之 法定新型專利要件，羑依法提出申請，懇言奢#局核准本件 新型專利申請案，以勵發明，至感德便。 【圖式簡單說明】 請參閱以下有關本發明一較佳實施例之詳細說明及其附 圖，將可進—步瞭解本發明之技術内容及其目的功效；有關 12 1245877 該實施例之附圖為： 圖一為本發明一種利用位置感測器平板所建立之工具機 量測裝置之外觀立體圖； 、 圖一（A)〜（D)為該一種利用位置感測器平板所建立之工 具機量測裝置之幾何誤差量測路徑示意圖； 圖三為該一種利用位置感測器平板所建立之工具機量測 液置之平台校正流程圖； 、The pole is lowered from ten degrees, as shown in the A-B path of Figure 2 (A). At this time, each position sensor 21 can be (the linear error error of the Z axis; similarly, the angle and angle can also be measured in the C-D path. The linear error and angular error of the Z-axis of J; move the laser light source fixture along χ. 仃, as shown in the BC path of Figure 2 (A). At this time, the X-axis is listed in each position sensor J The linear error and angular error of the same; the linear error and angular error of the X axis can also be measured in the DA path. The laser light source is clamped in parallel with the "i / port γ axis, as shown in Figure 2 (B BC path, at this time the linear and angular errors of the Z axis are measured in the position sensor 21; similarly, the Z and Y axis linear and angular errors can be measured in the DA path. 〈Action description〉 (1) Calibration of the position sensor plate: Shoot the laser light source clamp fixture 1 The laser light source of the light source clamp fixture 1 is fixed on the main shaft of the machine tool and shoot the laser 13 into it—a position sensor 21 10 1245877 original Point 'defines this point as the origin of the coordinates of the position sensing Ding YouZ, and then moves the machine tool in the direction of the X axis + number-person, And capture the signal of position sensor 21 and record the machine tool's mobile coordinates, and use the least square method for the signal whose position should be 21 and the machine tool's mobile coordinates. P The calibration curve of the 2X axis of the position sensor plate is required. According to this method, you can obtain the calibration curve of the 2Υ axis of the position sensor thousand plate by moving the “Gongchengde” branch on the Y axis. The flow chart is shown in the third figure. (2) Repeatability test: Repeatability During the test, Yu Taizheng used a set of laser light sources 13 in this example, and set four position sensors 21 91 ^ / The case is clear, and each position sensor 21 is based on (2b1 , 21-2, 21-3, and-T yd 4) Represent, and when the platform of the machine tool is moved, the position where one of the laser light source 13 must stay is shown in the fourth figure, and then the laser light source 13 The emitted light point is moved to the position sensor 21 (21 -1), and the receiver is connected to the data according to the process shown in the figure 5 of the brother. Take data. The general repeatability test will go through More than five times, ^ "Liu Yizhen yelled whether the repeatability was good when the machine tool moved. For the evaluation of the repeatability of work, gas and gas, the average and standard deviation of the positioning can be calculated by using the method of counting. (3) Measurement of geometric error: In terms of geometric error, the position of the pool should be 1000 plate 1 and laser light source 21 one by one without the display error. Once the position sensor plate 2 is arranged, please refer to the third figure. 1245877 Measurement path II, measurement path moves sequentially; each bit error during movement. The flow is as shown in the sixth figure, and the measurement path IV is also displayed according to the sensor 21. [Features and effects] One of the types of position sensor plates provided by the present invention The built-in machine measuring device has five positions in each position. Generally, it is divided into degrees according to the measurement. When the 1D and 2D '2D-position sensors are irradiated by Lei Yi and the first source of field shots, they will Generate a series of two-dimensional signals 'This set of two-dimensional signals can indicate the coordinate position of this laser at position ❹ :, but since each position sensor can only supply-a small range of coordinates', multiple positions can be used Sensors and plates are used to adjust and locate the measurement of cracks. The price is cheap, the rod and the wood are convenient, and the high precision target can be achieved. The above detailed description is specific to the permissible examples of the present " ~ 3, but this embodiment is not intended to limit the scope of the patents of the present invention. Anything that does not depart from the technical spirit of the present invention is effective for Dai Temple. All her or changes should be included in the scope of the i patent in this case. 〃 In summary, this case is not only innovative in terms of space type, but also enhances the above-mentioned multiple effects over conventional items. It should have fully complied with the novel and progressive statutory new patent requirements, and filed an application in accordance with the law. # 局 approved this new type of patent application to encourage inventions. [Brief description of the drawings] Please refer to the following detailed description of a preferred embodiment of the present invention and the accompanying drawings, which will further understand the technical content of the present invention and its purpose and effectiveness; 12 1245877 attached drawings of this embodiment For: Figure 1 is a perspective view of the appearance of a machine tool measuring device built using a position sensor tablet according to the present invention; and Figures 1 (A) ~ (D) are a machine tool built using a position sensor tablet Schematic diagram of the geometric error measurement path of the measurement device; Figure 3 is a flow chart of the calibration platform for measuring the liquid position of a machine tool using a position sensor flat panel;
圖四為該一種利用位置感測器平板所建立之工具機量測 置之重複性誤差測試光點位置示意圖；Figure 4 is a schematic diagram of the position of a repeatable error test light spot for a machine tool measurement set up using a position sensor plate;
立之工具機量測 立之工具機量測Vertical machine tool measurement Vertical machine tool measurement
圖五為該一種利用位置感測器平板所建 裝置之重複性測試流程圖；以及 圖六為該一種利用位置感測器平板所建 凌置之幾何誤差量測流程圖。 【主要部分代表符號】 1雷射光源夾治具 11第一桿件 1 2 第二桿件 121容置孔 1 3雷射光源 2位置感測器平板 2 1位置感測器 13Figure 5 is a repeatability test flow chart of the device built using a position sensor plate; and Figure 6 is a flow chart of geometric error measurement of the block built using a position sensor plate. [Representative symbols of main parts] 1 Laser light source clamp 11 First member 1 2 Second member 121 Receiving hole 1 3 Laser light source 2 Position sensor plate 2 1 Position sensor 13