200538698 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種利用位置感測器平板所建立之工具機 量測裝置，特別是指一種利用位置感測器經由雷射光照射時 會產生二維的訊號的原理，將多個位置感應器放置平板上構 成位置感應器平板，再將位置感應器平板擺放於工具機平 台，而當雷射光照射位置感應器，即可產生多組二維訊號， 這些訊號經過轉換及計算即可得到幾何誤差及定位重複性。 【先前技術】 按，目前習用之工具機，將一剛體置於該工具機的平台 移動時，在空間中即會產生六個自由度誤差，包括三個線二 誤差（Δχ、Ay、Λζ)與三個角度誤差（俯仰、搖擺、橫轉誤 差），應此加工出來的產品精度及品質會受到六個自由度的 决差影響，所以需要有六自由度的量測裝置來調整、定位及 控制。 然而’近幾年來工具機的加工皆朝向微小化、精密化與 奈米級的技術發展，工具機的加工精密度會直接影響產品產 出：品質’因此，該工具機的精度，往往都需要配合高精密 的量測設備，方可使工具機的精度大大提昇。 由此可見’上述習用物品仍有諸多缺失1非一良善之 設計者，而亟待加以改良。 本案發明人鑑於上述f用之卫具機量測裝置所衍生的各 200538698 項缺點，乃亟思加以改良創新 後，終於成功研發完成本件一 之工具機量測裝置。 ’並經多年苦心孤詣潛心研究 種利用位置感測器平板所建立 【發明内容】 本發明之目的即在於榇彳址 杈仪一種利用位置感測器平板所建 立之工具機量測裝置，直奘 八、置之运射光源夾治具係可固定於 ’、機之紋轉軸刀夾上或者工具z軸，並配合多個位置感測 器，所建立的平板而成的量職置，使該卫具機之平台移動 時，同步獲取工具機的幾何誤差及重複性。 【實施方式】 種利用位置感測器平板所建 •一雷射光源夾治具，其係由 可達成上述新型目的之一 立之工具機量測裝置，包括有 一垂直於地面第一桿件也一伞#狄 干千/、千仃於地面的第二桿件成倒τ 字形態相接形成’且該第二桿件係、為—矩形體，並在其各表 面設有-個以上的容置孔，以供—可提供固定波長的雷射光 束的雷射光源容置；-位置感測器平板與該雷射光源爽治具 相對之面’平均的分佈有-個以上的位置感測器，而各位置 感測器係可接收由雷射光源所射出的雷射光束，且位置感應 ϋ會因雷以射位置不同而產生不同的二維訊號，而可計算 工具機的幾何誤差及定位重複性。 【實施方式】 本發明所提供的一種利用 請參閱第一圖至第六圖所示 200538698 位置感測器平板所建立之工具機量測裝置，其設有一雷射光 源夾治具1，而该雷射光源夾具1具有一個以上可發出光源 的雷射光源13，於本發中係以二個雷射光源13為例說明， 而且除雷射光源之外，亦可使用可見光、微波、紅外光、紫 外光及X射線等，且此光源係可由一位置感測器平板2所具 有的各位置感測器21接收，進而量測出其距離。而位置感 測器，可採用雷射四象儀或電荷耦合器等位置感測器。 該雷射光源夾治具1，其係由一垂直於地面的第一桿件 11與一平行於地面的第二桿件12相接而形成一倒T字形 悲，且該第二桿件12係為一矩形體，並在第二桿件丨2之表 面设有一個以上的容置孔丨21，以供一可提供固定波長之雷 射光束的雷射光源1 3容置。 該位置感測平板2與該雷射光源夾治具丨相對之面， 平均分佈的設有一個以上的位置感測器21，而各位置感測器 21係可接收由雷射光源13所射出的雷射光束，且各位置感 應器21會因雷射入射位置不同而產生不同的二維訊號，而 可計算工具機（圖中未示）的幾何誤差及定位重複性。 且本發明之量測裝置的原理㈣用二維位置感測器，將 多組位置感測器21裝置在位置感測器平板2上，並將該位 置感測器平板2放置工具機平台上，將每—個位置感測器21 的訊號線接到訊號處理器（圖中未示），並將訊號處理器的 200538698 輸出接到類比/數位卡，最後透過電腦（PC)擷取訊號。 由於容置各雷射光源1 3的雷射光源夾治具1固定在工具 機旋轉軸刀夾上，當該工具機平台上的位置感應器21受到 雷射光源1 3照射時，會產生一組二維訊號，即是雷射光源 13在此位置感應器2.[的位置訊號，而該位置感應器平板2 用於量測前，必須先經過校正，且經過校正的位置感應器平 板2可以將每顆位置感應器21的擺設誤差消除，且賦予每 個位置感應器21可以提供位置感應器平板2上的座標位置 之能力。 (1)位置感應器平板校正： 將/、中顆位置感應器21原點定義為位置感應器平板2 的座標原點，其他位置感應器21的座標位置均以相對於此 位置感應ϋ 21座標位置來定義。將位置感應器平板2的校 正分成X軸校正與γ軸校正兩次，再义軸校正時，將工具機 平台往X軸方向移動數次，並將每次移動時的各位置感應器 21擷取訊號與工具機移動座標紀錄下來，最後將所得之各位 置感應器21擷取之訊號與其相對應的工具機移動座標透過 最小平方法即可算出位置感測器21之χ轴校正曲線，以同 樣方式將平台沿γ軸移動並擷取各位置感應器Η訊號與工 具機移動座標紀錄’如此透過最小平方法可以的到γ軸的校 正取線。 200538698 (2) 重複性測試： 將該工具機之平台移動時，紀錄該工具機之平台的位 置並。己錄各位置感應器21之位置的訊號，將紀錄的各位 置^應器21訊號透過校正曲線之校正，即可得到該工具機 的貫際位置。如此將其平台重複移動於多點之間再將所得 之二維訊號經過轉換及計算，即 1 ^ W 3侍到平台之定位重複性。 (3) 幾何誤差量測： _在幾何誤差方面將量測路徑共分為四種；如第二圖所 不’將該雷射光源夾治具沿z軸平行下降，如圖二⑴之Μ 路徑，此時各位置感應器21可昔钏Ψ μ a α 匕丄J里/則出Z軸的線性誤差及角 度誤差；同理在C - D路徑也可吾、、目丨丨山7 土 仅也了里測出z軸的線性誤差及角度 誤差；在將該雷射光源夾治呈〗 八丄/口 X軸平行移動，如圖二（A) 之β-C路徑，此時各位置咸廡哭9 1 π日 直以應克21可量測出X軸的線性誤 差及角度誤差；同理在D-A路栌★可旦、日丨，，， 略k也可里測出X軸的線性誤差 及角度誤在將該雷射光源夾治呈1 VL V虹 /、1 /口 γ軸平行移動，如圖二 (Β)之B-C路徑，此時位置感岸罘曰 Λ應為可ϊ剩出Υ軸的線性誤 差及角度誤差；同理在D-A路徑也可詈钏山v A , 1j里測出Y軸的線性誤差 及角度誤差。 〈動作說明〉 (I)位置感應器平板校正： 將該雷射光源夾治具i固定於工具機之主軸上，並將雷 200538698 射光源夹治具1之雷射光源13射入其中-顆位置感應器21 原.點’將此點定義為位置感應器平板2的座標原點，再將工 具機往X轴方向移動數今 數久並且擷取位置感應器21之訊號 與紀錄工具機移動座標 1置玖應為21之訊號與工具機 移動座標做最小平方法即可求 J求仔位置感應器平板2χ軸的校 、在依此方法將工具機往γ軸移動即可求得位 平板2丫軸的校正曲線如，其流程圖第三圖所示。 (2 )重複性測試： 在進行重複性測試時，於本實施例中係以—組雷射光源 ⑴並設定四個位置感應器21為例說明，且各位置感應器 21係以（21-1、21-2、21-3及2卜4)表干，而a兮 〜衣不，而當該工具機之 平台移動時’雷射光原13之雷射光必須停留的位置如第四 圖所示1後將雷射光源13所射出的光點，移動到位置感 應器21 (2卜"上’接著依第五圖所示之流程擷取資料。一 般的重複性測試會經過五次以上的輪迴，以測試出工具機移 動時重複性是否良好。對於卫具機重複性的評估，可以利用 統計方法，計算出其定位平均值及標準差。 (3)幾何誤差量測： 在幾何誤差方面，將位置感應器平板i及雷射光源21 建立在沒有擺設誤差的情形下。 依位置感應器平板2的擺設方式，請參閱第二圖所示。 200538698 在量測路徑1中依Α-β-C-D順序將雷射光源夹治具i移動. 量測路徑η、量剛路徑⑴、量測路徑lv也依照㈠ :序移動；在移動時各位置感應器21將顯示出量測的幾何 e吳差。其流程如第六圖所示。 【特點及功效】 本發明所提供之種利用位置感測器平板所建立之工 具機量測裝置’其各位置感測器一般依測量為度分為，卯及 2D，2D—位置感應器受到雷射光源的照射時，其會產生一組 二維的訊號，這一組二維訊號可以表示此雷射在位置感應器 上的座標位置，但由於每個位置感應器只能供應—小段範圍 的座‘故可利用多個位置感應器與平板來做量測裝置之調 整與定位’其價錢便宜、架設方便且可以達到高精密度目標。 上列詳細說明係針對本發明之一可行實施例之具體說 明’惟該實施例並非用以限制本發明之專利範圍，凡未脫離 本發明技藝精神所為之等效實施或變更，均應包含於本案之 專利範圍中。 综上所述’本案不但在空間型態上確屬創新，並能較習 用物。口 i曰進上述多項功效，應已充分符合新穎性及進步性之 法定新型專利要件’爰依法提出巾請，㈣貴局核准本件 新型專利申請案’以勵發明，至感德便。 【圖式簡單說明】 請參閱以下有關本發明一較佳實施例之詳細說明及其附 12 200538698 圖’將可進一步睁解太路gg > a 荩解4 ^明之技術内容及其目的功效 該實施例之附圖為： 有關 圖為本發明一種利用位置感測器平板所建立之工具 里測裝置之外觀立體圖； • (A) (D )為„亥一種利用位置感;則器平板所建立之工 具機量測裝置之幾何誤差量測路徑示意圖； 圖三為該-種利用位置感測器平板所建立之工具機量測 裝置之平台校正流程圖； 、 圖四為該-種利用位置感測器平板所建立 裳置之重複性誤差測試光點位置示意圖； 圖五為該一種利用位置感測器平板所建立 裝置之重複性測試流程圖；以及 圖六為該一種利用位置感測器平板所建立 裝置之幾何誤差量測流程圖。【主要部分代表符號】 之工具機量測200538698 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a machine tool measuring device built using a position sensor plate, and in particular refers to a device that uses a position sensor to emit two laser beams when irradiated with laser light. The principle of the dimension signal is to place multiple position sensors on a flat plate to form a position sensor plate, and then place the position sensor plate on the machine tool platform. When the laser light irradiates the position sensor, multiple sets of two-dimensional Signals, these signals can be converted and calculated to obtain geometric errors and positioning repeatability. [Previous technology] According to the currently used machine tool, when a rigid body is placed on the platform of the machine tool, six degrees of freedom errors will be generated in space, including three line two errors (Δχ, Ay, Λζ). With three angle errors (pitch, roll, roll error), the accuracy and quality of the product processed by this will be affected by the difference of six degrees of freedom, so a six-degree-of-freedom measuring device is required to adjust, position and control. However, in recent years, the processing of machine tools has been trending toward miniaturization, precision, and nanometer-level technology development. The precision of machine tools will directly affect the product output: quality. Therefore, the precision of this machine tool often requires With high-precision measurement equipment, the accuracy of machine tools can be greatly improved. It can be seen that there are still many shortcomings in the above-mentioned conventional articles. 1 It is not a good designer, and it needs to be improved. In view of the above-mentioned 200538698 shortcomings derived from the above-mentioned safety machine measuring device, the inventor of this case, after eager to improve and innovate, finally successfully developed the machine tool measuring device of this one. 'And after many years of painstaking research, it was established using a position sensor plate. [Abstract] The object of the present invention is to use a position sensor plate to build a machine tool measuring device using a position sensor plate. The Zhizhiyun light source fixture can be fixed on the machine's rotary knife holder or tool z-axis, and coordinated with multiple position sensors, the built-in volume measuring position makes the health When the machined platform moves, the geometric errors and repeatability of the machine tool are acquired simultaneously. [Embodiment] A laser light source clamp built using a position sensor plate is a measuring device for a machine tool that can achieve one of the above-mentioned new purposes, including a first rod member perpendicular to the ground.一 伞 # Di Qianqian /, the second member on the ground is formed in the shape of an inverted τ, and the second member is a rectangular body, and more than one Receiving holes for-laser light source that can provide a laser beam with a fixed wavelength;-the position of the sensor sensor plate and the opposite side of the laser light source fixture are evenly distributed with more than one position sensing Each position sensor can receive the laser beam emitted by the laser light source, and the position sensor can generate different two-dimensional signals due to different laser positions, and can calculate the geometric error and Positioning repeatability. [Embodiment] The present invention provides a machine tool measuring device using a 200538698 position sensor plate shown in the first to sixth figures, which is provided with a laser light source fixture 1, and the The laser light source fixture 1 has more than one laser light source 13 capable of emitting light. In this disclosure, two laser light sources 13 are used as an example. In addition to the laser light source, visible light, microwave, and infrared light can also be used. , Ultraviolet light, X-ray, etc., and the light source can be received by each position sensor 21 included in a position sensor plate 2, and the distance can be measured. As the position sensor, a position sensor such as a laser four imager or a charge coupler can be used. The laser light source clamping device 1 is formed by a first rod member 11 perpendicular to the ground and a second rod member 12 parallel to the ground to form an inverted T-shaped saddle, and the second rod member 12 It is a rectangular body, and more than one receiving hole 21 is provided on the surface of the second rod member 2 for receiving a laser light source 13 that can provide a laser beam with a fixed wavelength. On the opposite side of the position sensing plate 2 and the laser light source fixture, more than one position sensor 21 is evenly distributed, and each position sensor 21 can receive the light emitted by the laser light source 13 Laser beam, and each position sensor 21 will generate different two-dimensional signals due to different laser incident positions, and can calculate geometric errors and positioning repeatability of machine tools (not shown). And the principle of the measuring device of the present invention is to use a two-dimensional position sensor to install a plurality of groups of position sensors 21 on a position sensor plate 2 and place the position sensor plate 2 on a machine tool platform , Connect the signal line of each position sensor 21 to the signal processor (not shown), and connect the 200538698 output of the signal processor to the analog / digital card, and finally capture the signal through the computer (PC). Since the laser light source clamps 1 accommodating the laser light sources 13 are fixed on the rotary tool holder of the machine tool, when the position sensor 21 on the machine tool platform is illuminated by the laser light source 13, a A two-dimensional signal is the position signal of the laser light source 13 at this position sensor 2. [, and the position sensor plate 2 must be calibrated before being used for measurement, and the corrected position sensor plate 2 The positioning error of each position sensor 21 can be eliminated, and each position sensor 21 can be given the ability to provide the coordinate position on the position sensor plate 2. (1) Calibration of the position sensor plate: The origin of the center sensor 21 is defined as the origin of the coordinates of the position sensor plate 2. The coordinates of the other position sensors 21 are relative to this position. Ϋ 21 coordinates Location to define. The calibration of the position sensor plate 2 is divided into X-axis calibration and γ-axis calibration twice. When the sense axis calibration is performed, the machine tool platform is moved to the X-axis direction several times, and each position sensor 21 is captured each time. The signal and the machine tool's moving coordinates are recorded, and finally, the obtained signal captured by each position sensor 21 and its corresponding machine tool's moving coordinates can be used to calculate the χ-axis correction curve of the position sensor 21 through the least square method. In the same way, move the platform along the γ axis and capture the position sensor's signals and machine tool coordinate records' so that the calibration line can be taken to the γ axis through the least square method. 200538698 (2) Repeatability test: When the platform of the machine tool is moved, the position of the platform of the machine tool is recorded and merged. The position signal of each position sensor 21 has been recorded, and the recorded bits of the position sensor 21 can be corrected by the calibration curve to obtain the consistent position of the machine. In this way, the platform is repeatedly moved between multiple points, and then the obtained two-dimensional signal is converted and calculated, that is, the positioning repeatability of 1 ^ W 3 is served by the platform. (3) Geometric error measurement: _ The measurement path is divided into four types in terms of geometric error; as shown in the second figure, the laser light source fixture is lowered in parallel along the z-axis, as shown in Figure 2M. Path, at this time, each position sensor 21 can be a μ a α 丄 J J / then the linear error and angular error of the Z axis; the same reason can also be used in the C-D path. Only the linear and angular errors of the z-axis were measured; the laser light source was clamped and moved in parallel to the X-axis / port X-axis, as shown in the β-C path of Figure 2 (A). At this time, each position Xian wai wai 9 1 π Straight to Ying Ke 21 can measure the linear error and angular error of the X axis; the same way on the DA road ★ Ke Dan, Japan ,,,, a little k can also be measured in the X axis The linearity error and the angle error are caused by the laser light source to move in parallel with 1 VL V //, 1 / port γ axis, as shown in the BC path of Figure 2 (B). At this time, the position sense should be acceptable. The linear and angular errors of the Z axis are left; similarly, the linear and angular errors of the Y axis can be measured in the DA path in the mountain path v A, 1j. <Description of operation> (I) Calibration of the position sensor plate: Fix the laser light source fixture i on the main shaft of the machine tool, and shoot the laser light source 13 of the laser 200538698 light source fixture 1 into one of them. Position sensor 21 origin. Point 'This point is defined as the origin of the coordinates of the position sensor plate 2. Then move the machine tool in the X axis direction for a long time and capture the signal of the position sensor 21 and record the movement of the machine tool. Coordinate 1 should be set to the signal of 21 and the machine tool's moving coordinates can be found by doing the least square method. You can find the calibration of the 2χ axis of the position sensor plate. Then move the machine tool to the γ axis according to this method. The calibration curve of the 2 axis is shown in the third figure of the flowchart. (2) Repeatability test: In the repeatability test, in this embodiment, a group of laser light sources ⑴ and four position sensors 21 are set as an example, and each position sensor 21 is based on (21- 1, 21-2, 21-3, and 2 4) Surface dry, and a ~~ not, and when the platform of the machine tool moves, the position of the laser light of the laser light source 13 must stay as shown in the fourth figure After the display 1, the light spot emitted by the laser light source 13 is moved to the position sensor 21 (2 " on ', and then the data is retrieved according to the process shown in the fifth figure. The general repeatability test will pass more than five times Cycle to test whether the repeatability of the machine is good. For the evaluation of the repeatability of the machine, you can use statistical methods to calculate the positioning average and standard deviation. (3) Geometric error measurement: The geometric error On the other hand, the position sensor plate i and the laser light source 21 are established under the condition that there is no setting error. According to the positioning method of the position sensor plate 2, please refer to the second figure. 200538698 In the measurement path 1, according to Α- β-CD sequentially moves the laser light source fixture i. The measurement path η, The rigid path ⑴ and the measurement path lv are also moved in accordance with ㈠: in sequence; each position sensor 21 will display the measured geometric difference e during the movement. The flow is shown in the sixth figure. [Features and effects] The present invention The provided machine tool measuring device using a position sensor plate is provided. Its position sensors are generally divided into degrees according to the measurement. When the position sensor is illuminated by a laser light source, It will generate a set of two-dimensional signals. This set of two-dimensional signals can indicate the coordinate position of the laser on the position sensor, but since each position sensor can only supply-a small range of seats, it can be used more Position sensors and tablets to adjust and position the measurement device 'It's cheap, easy to set up, and can achieve high precision goals. The detailed description above is a specific description of one possible embodiment of the present invention', but this implementation The examples are not intended to limit the scope of the patent of the invention, and any equivalent implementation or change that does not depart from the technical spirit of the invention should be included in the scope of the patent of the case. In summary, 'this case is not only empty The type is indeed innovative and can be compared with conventional ones. The above-mentioned multiple effects should meet the statutory new patent elements that are fully in line with novelty and advancement. "Please submit a request in accordance with the law, and your office will approve this new patent application. The plan is to invent inventions to the highest level. [Brief description of the drawings] Please refer to the following detailed description of a preferred embodiment of the present invention and its attached 12 200538698 Figures' will further open the road gg > a 荩The technical content and purpose of the solution are as follows: The related figure is an external perspective view of a tool measuring device built using a position sensor tablet according to the present invention; (A) (D) is „ Here is a schematic diagram of the geometric error measurement path of the machine tool measuring device established by the device plate; Figure 3 is a platform calibration flowchart of the machine tool measuring device established by the position sensor plate. ; Figure 4 is a schematic diagram of the position of the repeatable error test light spot established by the position sensor plate; Figure 5 is a schematic diagram of the device established by the position sensor plate. Flow chart of renaturation test; and Figure 6 is a flow chart of geometric error measurement of the device built using a position sensor plate. [Main part representative symbol] Machine tool measurement
之工具機量測 之工具機量測 1雷射光源夾治具 11第一桿件 12第二桿件Machine tool measurement Machine tool measurement 1 Laser light fixture 11 First lever 12 Second lever
1 2 1容置孔 1 3雷射光源 2位置感測器平板 13 200538698 2 1位置感測器1 2 1 Receiving hole 1 3 Laser light source 2 Position sensor plate 13 200538698 2 1 Position sensor
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