JPS6123765Y2 - - Google Patents
Info
- Publication number
- JPS6123765Y2 JPS6123765Y2 JP1550279U JP1550279U JPS6123765Y2 JP S6123765 Y2 JPS6123765 Y2 JP S6123765Y2 JP 1550279 U JP1550279 U JP 1550279U JP 1550279 U JP1550279 U JP 1550279U JP S6123765 Y2 JPS6123765 Y2 JP S6123765Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- test object
- optical flat
- optical
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 28
- 235000012431 wafers Nutrition 0.000 description 8
- 239000003818 cinder Substances 0.000 description 7
- 229910000859 α-Fe Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550279U JPS6123765Y2 (US20020193084A1-20021219-M00002.png) | 1979-02-08 | 1979-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550279U JPS6123765Y2 (US20020193084A1-20021219-M00002.png) | 1979-02-08 | 1979-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55116209U JPS55116209U (US20020193084A1-20021219-M00002.png) | 1980-08-16 |
| JPS6123765Y2 true JPS6123765Y2 (US20020193084A1-20021219-M00002.png) | 1986-07-16 |
Family
ID=28837312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1550279U Expired JPS6123765Y2 (US20020193084A1-20021219-M00002.png) | 1979-02-08 | 1979-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6123765Y2 (US20020193084A1-20021219-M00002.png) |
-
1979
- 1979-02-08 JP JP1550279U patent/JPS6123765Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55116209U (US20020193084A1-20021219-M00002.png) | 1980-08-16 |
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