JPS6123675B2 - - Google Patents

Info

Publication number
JPS6123675B2
JPS6123675B2 JP52027975A JP2797577A JPS6123675B2 JP S6123675 B2 JPS6123675 B2 JP S6123675B2 JP 52027975 A JP52027975 A JP 52027975A JP 2797577 A JP2797577 A JP 2797577A JP S6123675 B2 JPS6123675 B2 JP S6123675B2
Authority
JP
Japan
Prior art keywords
sample
base
slider
members
body member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52027975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53114382A (en
Inventor
Kyoshi Ishikawa
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2797577A priority Critical patent/JPS53114382A/ja
Publication of JPS53114382A publication Critical patent/JPS53114382A/ja
Publication of JPS6123675B2 publication Critical patent/JPS6123675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2797577A 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type Granted JPS53114382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2797577A JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2797577A JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Publications (2)

Publication Number Publication Date
JPS53114382A JPS53114382A (en) 1978-10-05
JPS6123675B2 true JPS6123675B2 (enrdf_load_stackoverflow) 1986-06-06

Family

ID=12235862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2797577A Granted JPS53114382A (en) 1977-03-16 1977-03-16 Sample differential equipment of electric distortion driving type

Country Status (1)

Country Link
JP (1) JPS53114382A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171782U (enrdf_load_stackoverflow) * 1986-04-18 1987-10-31

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598018A (ja) * 1982-07-07 1984-01-17 Hitachi Ltd 微動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171782U (enrdf_load_stackoverflow) * 1986-04-18 1987-10-31

Also Published As

Publication number Publication date
JPS53114382A (en) 1978-10-05

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