JPS6123576B2 - - Google Patents
Info
- Publication number
- JPS6123576B2 JPS6123576B2 JP236179A JP236179A JPS6123576B2 JP S6123576 B2 JPS6123576 B2 JP S6123576B2 JP 236179 A JP236179 A JP 236179A JP 236179 A JP236179 A JP 236179A JP S6123576 B2 JPS6123576 B2 JP S6123576B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- signal
- etching
- recording
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000013518 transcription Methods 0.000 description 1
- 230000035897 transcription Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0057—Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure ; record carriers having a relief information structure provided with or included in layers not specific for a single reproducing method; apparatus or processes specially adapted for their manufacture
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP236179A JPS5597032A (en) | 1979-01-12 | 1979-01-12 | Forming method of signal recording board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP236179A JPS5597032A (en) | 1979-01-12 | 1979-01-12 | Forming method of signal recording board |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5597032A JPS5597032A (en) | 1980-07-23 |
JPS6123576B2 true JPS6123576B2 (de) | 1986-06-06 |
Family
ID=11527113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP236179A Granted JPS5597032A (en) | 1979-01-12 | 1979-01-12 | Forming method of signal recording board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5597032A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0251776U (de) * | 1988-10-05 | 1990-04-12 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1836704A2 (de) * | 2005-01-06 | 2007-09-26 | Koninklijke Philips Electronics N.V. | Verfahren zur herstellung einer matrize und herstellung einer matrize für ein substrat |
-
1979
- 1979-01-12 JP JP236179A patent/JPS5597032A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0251776U (de) * | 1988-10-05 | 1990-04-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS5597032A (en) | 1980-07-23 |
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