JPS6123008Y2 - - Google Patents
Info
- Publication number
- JPS6123008Y2 JPS6123008Y2 JP6529281U JP6529281U JPS6123008Y2 JP S6123008 Y2 JPS6123008 Y2 JP S6123008Y2 JP 6529281 U JP6529281 U JP 6529281U JP 6529281 U JP6529281 U JP 6529281U JP S6123008 Y2 JPS6123008 Y2 JP S6123008Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- furnace
- container
- exhaust
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 description 13
- 239000013078 crystal Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6529281U JPS6123008Y2 (enrdf_load_stackoverflow) | 1981-05-06 | 1981-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6529281U JPS6123008Y2 (enrdf_load_stackoverflow) | 1981-05-06 | 1981-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57180759U JPS57180759U (enrdf_load_stackoverflow) | 1982-11-16 |
| JPS6123008Y2 true JPS6123008Y2 (enrdf_load_stackoverflow) | 1986-07-10 |
Family
ID=29861336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6529281U Expired JPS6123008Y2 (enrdf_load_stackoverflow) | 1981-05-06 | 1981-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6123008Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5826095A (ja) * | 1981-07-31 | 1983-02-16 | Toshiba Ceramics Co Ltd | 単結晶シリコン引上装置 |
-
1981
- 1981-05-06 JP JP6529281U patent/JPS6123008Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57180759U (enrdf_load_stackoverflow) | 1982-11-16 |
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