JPS6122365U - thin film capacitor - Google Patents
thin film capacitorInfo
- Publication number
- JPS6122365U JPS6122365U JP10591184U JP10591184U JPS6122365U JP S6122365 U JPS6122365 U JP S6122365U JP 10591184 U JP10591184 U JP 10591184U JP 10591184 U JP10591184 U JP 10591184U JP S6122365 U JPS6122365 U JP S6122365U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film capacitor
- utility
- model registration
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第１図は本考案による薄膜コンデンサの断面図、第２図
は同じく多数個積層したコンデンサの断面図、第３図は
同じく分割したコンデンサの断面図、第４図は従来の集
積回路の平面図と断面図、第５図は同じく簡略にした断
面図てある。
４・・・・・・シリコン基板、５・・・・・・拡散層、
６，８・・・・・・絶縁層、９・・・・・・下部電極、
１０・・・・・・誘電体、１１・・・・・・上部電極。[Brief Description of the Drawings] Fig. 1 is a cross-sectional view of a thin film capacitor according to the present invention, Fig. 2 is a cross-sectional view of a multi-layered capacitor, Fig. 3 is a cross-sectional view of a divided capacitor, and Fig. 4 is A plan view and a cross-sectional view of a conventional integrated circuit, FIG. 5 is also a simplified cross-sectional view. 4... Silicon substrate, 5... Diffusion layer,
6, 8... Insulating layer, 9... Lower electrode,
10... Dielectric, 11... Upper electrode.
Claims (2)
の主面に設けた絶縁膜上に少くとも１個の電極および誘
電体が交互に重なって配置されたことを特徴とする薄膜
コンデンサ。(1) A thin film capacitor characterized in that at least one electrode and a dielectric are alternately arranged on an insulating film provided on the main surface of a semiconductor integrated circuit board on which functional elements are interconnected.
において、基板とほぼ等しい外形寸法を有することを特
徴とする薄膜コンデンサ。(2) Utility Model Registration The thin film capacitor according to claim 1, characterized in that the capacitor has an outer dimension approximately equal to that of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10591184U JPS6122365U (en) | 1984-07-13 | 1984-07-13 | thin film capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10591184U JPS6122365U (en) | 1984-07-13 | 1984-07-13 | thin film capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6122365U true JPS6122365U (en) | 1986-02-08 |
Family
ID=30665215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10591184U Pending JPS6122365U (en) | 1984-07-13 | 1984-07-13 | thin film capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6122365U (en) |
-
1984
- 1984-07-13 JP JP10591184U patent/JPS6122365U/en active Pending
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