JPS61222989A - 黒鉛構造を有する炭素薄膜の製造方法 - Google Patents

黒鉛構造を有する炭素薄膜の製造方法

Info

Publication number
JPS61222989A
JPS61222989A JP60056478A JP5647885A JPS61222989A JP S61222989 A JPS61222989 A JP S61222989A JP 60056478 A JP60056478 A JP 60056478A JP 5647885 A JP5647885 A JP 5647885A JP S61222989 A JPS61222989 A JP S61222989A
Authority
JP
Japan
Prior art keywords
reaction tube
hydrocarbon
benzene
thin film
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60056478A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321518B2 (enrdf_load_stackoverflow
Inventor
Yoshikazu Yoshimoto
好本　芳和
Tomonari Suzuki
鈴木　友成
Yoshiyuki Tougaki
良之 東垣
Shigeo Nakajima
中島　重夫
Toshio Inoguchi
猪口　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP60056478A priority Critical patent/JPS61222989A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to DE8686103833T priority patent/DE3678030D1/de
Priority to EP86103833A priority patent/EP0201696B1/en
Priority to EP88113145A priority patent/EP0305790B1/en
Priority to DE8888113145T priority patent/DE3687529T2/de
Publication of JPS61222989A publication Critical patent/JPS61222989A/ja
Priority to US07/190,353 priority patent/US4946370A/en
Priority to US07/344,961 priority patent/US5049409A/en
Publication of JPH0321518B2 publication Critical patent/JPH0321518B2/ja
Priority to US07/706,006 priority patent/US5273778A/en
Priority to US08/051,441 priority patent/US5404837A/en
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
JP60056478A 1985-03-20 1985-03-20 黒鉛構造を有する炭素薄膜の製造方法 Granted JPS61222989A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP60056478A JPS61222989A (ja) 1985-03-20 1985-03-20 黒鉛構造を有する炭素薄膜の製造方法
DE8686103833T DE3678030D1 (de) 1985-03-20 1986-03-20 Herstellung von kohlenstoffschichten.
EP86103833A EP0201696B1 (en) 1985-03-20 1986-03-20 Production of carbon films
EP88113145A EP0305790B1 (en) 1985-03-20 1986-03-20 Production of graphite intercalation compound and doped carbon films
DE8888113145T DE3687529T2 (de) 1985-03-20 1986-03-20 Herstellung von graphiteinlagerungsverbindung und gedopte carbonfilme.
US07/190,353 US4946370A (en) 1985-03-20 1988-05-05 Method for the production of carbon films having an oriented graphite structure
US07/344,961 US5049409A (en) 1985-03-20 1989-04-28 Method for metal or metal compounds inserted between adjacent graphite layers
US07/706,006 US5273778A (en) 1985-03-20 1991-05-28 Method for producing graphite intercalation compound
US08/051,441 US5404837A (en) 1985-03-20 1993-04-22 Method for preparing a graphite intercalation compound having a metal or metal compounds inserted between adjacent graphite layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60056478A JPS61222989A (ja) 1985-03-20 1985-03-20 黒鉛構造を有する炭素薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS61222989A true JPS61222989A (ja) 1986-10-03
JPH0321518B2 JPH0321518B2 (enrdf_load_stackoverflow) 1991-03-22

Family

ID=13028201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60056478A Granted JPS61222989A (ja) 1985-03-20 1985-03-20 黒鉛構造を有する炭素薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS61222989A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891100A (ja) * 1981-11-25 1983-05-30 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891100A (ja) * 1981-11-25 1983-05-30 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Also Published As

Publication number Publication date
JPH0321518B2 (enrdf_load_stackoverflow) 1991-03-22

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