JPS61220385A - ジヨセフソン接合素子 - Google Patents
ジヨセフソン接合素子Info
- Publication number
- JPS61220385A JPS61220385A JP60061244A JP6124485A JPS61220385A JP S61220385 A JPS61220385 A JP S61220385A JP 60061244 A JP60061244 A JP 60061244A JP 6124485 A JP6124485 A JP 6124485A JP S61220385 A JPS61220385 A JP S61220385A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnesium oxide
- lower electrode
- josephson junction
- tunnel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 28
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims abstract description 25
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000000395 magnesium oxide Substances 0.000 claims abstract description 22
- 239000010408 film Substances 0.000 claims abstract description 11
- 230000004888 barrier function Effects 0.000 claims description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052786 argon Inorganic materials 0.000 abstract description 7
- 238000000151 deposition Methods 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 2
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- -1 dioxygen nitride Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60061244A JPS61220385A (ja) | 1985-03-26 | 1985-03-26 | ジヨセフソン接合素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60061244A JPS61220385A (ja) | 1985-03-26 | 1985-03-26 | ジヨセフソン接合素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61220385A true JPS61220385A (ja) | 1986-09-30 |
| JPH0255955B2 JPH0255955B2 (enrdf_load_stackoverflow) | 1990-11-28 |
Family
ID=13165624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60061244A Granted JPS61220385A (ja) | 1985-03-26 | 1985-03-26 | ジヨセフソン接合素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61220385A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5047390A (en) * | 1988-10-03 | 1991-09-10 | Matsushita Electric Industrial Co., Ltd. | Josephson devices and process for manufacturing the same |
| US5099294A (en) * | 1989-08-01 | 1992-03-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure |
| JPH04299586A (ja) * | 1991-03-27 | 1992-10-22 | Agency Of Ind Science & Technol | ジョセフソン接合の作製方法 |
-
1985
- 1985-03-26 JP JP60061244A patent/JPS61220385A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5047390A (en) * | 1988-10-03 | 1991-09-10 | Matsushita Electric Industrial Co., Ltd. | Josephson devices and process for manufacturing the same |
| US5099294A (en) * | 1989-08-01 | 1992-03-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure |
| JPH04299586A (ja) * | 1991-03-27 | 1992-10-22 | Agency Of Ind Science & Technol | ジョセフソン接合の作製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0255955B2 (enrdf_load_stackoverflow) | 1990-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |