JPS61215291A - 気相成長装置 - Google Patents
気相成長装置Info
- Publication number
- JPS61215291A JPS61215291A JP5762385A JP5762385A JPS61215291A JP S61215291 A JPS61215291 A JP S61215291A JP 5762385 A JP5762385 A JP 5762385A JP 5762385 A JP5762385 A JP 5762385A JP S61215291 A JPS61215291 A JP S61215291A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- susceptor
- phase growth
- growth apparatus
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 85
- 239000010453 quartz Substances 0.000 claims abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000012495 reaction gas Substances 0.000 claims abstract description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 14
- 239000007789 gas Substances 0.000 abstract description 13
- 239000011810 insulating material Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5762385A JPS61215291A (ja) | 1985-03-22 | 1985-03-22 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5762385A JPS61215291A (ja) | 1985-03-22 | 1985-03-22 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61215291A true JPS61215291A (ja) | 1986-09-25 |
| JPH0251878B2 JPH0251878B2 (cg-RX-API-DMAC7.html) | 1990-11-08 |
Family
ID=13061003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5762385A Granted JPS61215291A (ja) | 1985-03-22 | 1985-03-22 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61215291A (cg-RX-API-DMAC7.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181155A (ja) * | 1995-09-29 | 1997-07-11 | Applied Materials Inc | 堆積装置のサセプタ |
| US6146464A (en) * | 1994-02-25 | 2000-11-14 | Applied Materials, Inc. | Susceptor for deposition apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517469U (cg-RX-API-DMAC7.html) * | 1978-07-20 | 1980-02-04 | ||
| JPS57203545U (cg-RX-API-DMAC7.html) * | 1981-06-19 | 1982-12-24 |
-
1985
- 1985-03-22 JP JP5762385A patent/JPS61215291A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517469U (cg-RX-API-DMAC7.html) * | 1978-07-20 | 1980-02-04 | ||
| JPS57203545U (cg-RX-API-DMAC7.html) * | 1981-06-19 | 1982-12-24 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6146464A (en) * | 1994-02-25 | 2000-11-14 | Applied Materials, Inc. | Susceptor for deposition apparatus |
| JPH09181155A (ja) * | 1995-09-29 | 1997-07-11 | Applied Materials Inc | 堆積装置のサセプタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251878B2 (cg-RX-API-DMAC7.html) | 1990-11-08 |
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