JPH0251878B2 - - Google Patents

Info

Publication number
JPH0251878B2
JPH0251878B2 JP60057623A JP5762385A JPH0251878B2 JP H0251878 B2 JPH0251878 B2 JP H0251878B2 JP 60057623 A JP60057623 A JP 60057623A JP 5762385 A JP5762385 A JP 5762385A JP H0251878 B2 JPH0251878 B2 JP H0251878B2
Authority
JP
Japan
Prior art keywords
substrate
ring
susceptor
shaped support
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60057623A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61215291A (ja
Inventor
Taisan Goto
Nobuo Kashiwagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP5762385A priority Critical patent/JPS61215291A/ja
Publication of JPS61215291A publication Critical patent/JPS61215291A/ja
Publication of JPH0251878B2 publication Critical patent/JPH0251878B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5762385A 1985-03-22 1985-03-22 気相成長装置 Granted JPS61215291A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5762385A JPS61215291A (ja) 1985-03-22 1985-03-22 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5762385A JPS61215291A (ja) 1985-03-22 1985-03-22 気相成長装置

Publications (2)

Publication Number Publication Date
JPS61215291A JPS61215291A (ja) 1986-09-25
JPH0251878B2 true JPH0251878B2 (cg-RX-API-DMAC7.html) 1990-11-08

Family

ID=13061003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5762385A Granted JPS61215291A (ja) 1985-03-22 1985-03-22 気相成長装置

Country Status (1)

Country Link
JP (1) JPS61215291A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5645646A (en) * 1994-02-25 1997-07-08 Applied Materials, Inc. Susceptor for deposition apparatus
JPH09181155A (ja) * 1995-09-29 1997-07-11 Applied Materials Inc 堆積装置のサセプタ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517469U (cg-RX-API-DMAC7.html) * 1978-07-20 1980-02-04
JPS57203545U (cg-RX-API-DMAC7.html) * 1981-06-19 1982-12-24

Also Published As

Publication number Publication date
JPS61215291A (ja) 1986-09-25

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