JPS61206233A - 半導体製造装置のリ−ドフレ−ムフイ−ド機構 - Google Patents

半導体製造装置のリ−ドフレ−ムフイ−ド機構

Info

Publication number
JPS61206233A
JPS61206233A JP60046841A JP4684185A JPS61206233A JP S61206233 A JPS61206233 A JP S61206233A JP 60046841 A JP60046841 A JP 60046841A JP 4684185 A JP4684185 A JP 4684185A JP S61206233 A JPS61206233 A JP S61206233A
Authority
JP
Japan
Prior art keywords
lead frame
magazine
sensor
pitch
buffer magazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60046841A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511420B2 (cg-RX-API-DMAC10.html
Inventor
Yutaka Hojo
北城　豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP60046841A priority Critical patent/JPS61206233A/ja
Publication of JPS61206233A publication Critical patent/JPS61206233A/ja
Publication of JPH0511420B2 publication Critical patent/JPH0511420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W95/00—

Landscapes

  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Warehouses Or Storage Devices (AREA)
JP60046841A 1985-03-09 1985-03-09 半導体製造装置のリ−ドフレ−ムフイ−ド機構 Granted JPS61206233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60046841A JPS61206233A (ja) 1985-03-09 1985-03-09 半導体製造装置のリ−ドフレ−ムフイ−ド機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60046841A JPS61206233A (ja) 1985-03-09 1985-03-09 半導体製造装置のリ−ドフレ−ムフイ−ド機構

Publications (2)

Publication Number Publication Date
JPS61206233A true JPS61206233A (ja) 1986-09-12
JPH0511420B2 JPH0511420B2 (cg-RX-API-DMAC10.html) 1993-02-15

Family

ID=12758563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60046841A Granted JPS61206233A (ja) 1985-03-09 1985-03-09 半導体製造装置のリ−ドフレ−ムフイ−ド機構

Country Status (1)

Country Link
JP (1) JPS61206233A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453554A (en) * 1987-08-25 1989-03-01 Sony Corp Assembly system for semiconductor device
JPH04133901A (ja) * 1990-09-27 1992-05-07 Komatsu Giken Kk 収納ラックの位置決め方法および位置決め装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638733U (cg-RX-API-DMAC10.html) * 1979-08-30 1981-04-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638733U (cg-RX-API-DMAC10.html) * 1979-08-30 1981-04-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453554A (en) * 1987-08-25 1989-03-01 Sony Corp Assembly system for semiconductor device
JPH04133901A (ja) * 1990-09-27 1992-05-07 Komatsu Giken Kk 収納ラックの位置決め方法および位置決め装置

Also Published As

Publication number Publication date
JPH0511420B2 (cg-RX-API-DMAC10.html) 1993-02-15

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