JPS61203383A - 基板保持構造 - Google Patents

基板保持構造

Info

Publication number
JPS61203383A
JPS61203383A JP60037102A JP3710285A JPS61203383A JP S61203383 A JPS61203383 A JP S61203383A JP 60037102 A JP60037102 A JP 60037102A JP 3710285 A JP3710285 A JP 3710285A JP S61203383 A JPS61203383 A JP S61203383A
Authority
JP
Japan
Prior art keywords
substrate
substrate holding
face
pair
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60037102A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139653B2 (enExample
Inventor
白相　曉
有紀 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP60037102A priority Critical patent/JPS61203383A/ja
Publication of JPS61203383A publication Critical patent/JPS61203383A/ja
Publication of JPH0139653B2 publication Critical patent/JPH0139653B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP60037102A 1985-02-26 1985-02-26 基板保持構造 Granted JPS61203383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60037102A JPS61203383A (ja) 1985-02-26 1985-02-26 基板保持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60037102A JPS61203383A (ja) 1985-02-26 1985-02-26 基板保持構造

Publications (2)

Publication Number Publication Date
JPS61203383A true JPS61203383A (ja) 1986-09-09
JPH0139653B2 JPH0139653B2 (enExample) 1989-08-22

Family

ID=12488219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60037102A Granted JPS61203383A (ja) 1985-02-26 1985-02-26 基板保持構造

Country Status (1)

Country Link
JP (1) JPS61203383A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0326768U (enExample) * 1988-11-16 1991-03-19
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット
JP2002166234A (ja) * 2000-09-22 2002-06-11 Sharp Corp 薄形板状半導体部品の検査分類システム
KR20140001788A (ko) * 2012-06-28 2014-01-07 호야 가부시키가이샤 마스크 블랭크 수납 케이스 및 마스크 블랭크 수납체
KR20180106319A (ko) * 2017-03-20 2018-10-01 주식회사 포미스 기판 이송용 흔들림 방지용 기판 수용부재
WO2023182314A1 (ja) * 2022-03-22 2023-09-28 三井化学株式会社 ペリクル包装体及びペリクル収容体

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002225949A (ja) * 2001-01-31 2002-08-14 Asahi Kasei Corp ガラス基板用緩衝材
JP4339214B2 (ja) 2004-09-13 2009-10-07 Ｈｏｙａ株式会社 マスクブランク用透明基板とその製造方法及びマスクブランクとその製造方法
JP4520263B2 (ja) 2004-09-16 2010-08-04 Ｈｏｙａ株式会社 マスクブランク提供システム、マスクブランク提供方法、マスクブランク用透明基板の製造方法、マスクブランクの製造方法及びマスクの製造方法
JP5268142B2 (ja) 2008-09-27 2013-08-21 Ｈｏｙａ株式会社 マスクブランク収納ケース及びマスクブランクの収納方法、並びにマスクブランク収納体

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0326768U (enExample) * 1988-11-16 1991-03-19
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット
JP2002166234A (ja) * 2000-09-22 2002-06-11 Sharp Corp 薄形板状半導体部品の検査分類システム
KR20140001788A (ko) * 2012-06-28 2014-01-07 호야 가부시키가이샤 마스크 블랭크 수납 케이스 및 마스크 블랭크 수납체
JP2014029519A (ja) * 2012-06-28 2014-02-13 Hoya Corp マスクブランク収納ケース及びマスクブランク収納体
KR20180106319A (ko) * 2017-03-20 2018-10-01 주식회사 포미스 기판 이송용 흔들림 방지용 기판 수용부재
WO2023182314A1 (ja) * 2022-03-22 2023-09-28 三井化学株式会社 ペリクル包装体及びペリクル収容体
JPWO2023182314A1 (enExample) * 2022-03-22 2023-09-28

Also Published As

Publication number Publication date
JPH0139653B2 (enExample) 1989-08-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term