1226672 A7 __B7 五、發明説明（1 ) 發明背景 ， 發明領域 (請先閱讀背面之注意事項再填寫本頁) 本發明係關於精確基材之儲存容器，用於儲存由半導 體晶圓及玻璃基材等物所製成之精確基材。詳細地說，本 發明係關於一種調整裝置，用於限制精確基材從容器的開 口處滑出，且減少由支撐構件所支撐之精確基材的彎曲。 習知技術說明 近年來’由半導體晶圓所製成之精確基材W可形成很 大的尺寸以增加產量，且藉由自動輸送機器以精確基材之 儲存容器來處理。 經濟部智慧財產局員工消費合作社印製 這種精確基材之儲存容器包含一容器主體、一底板及 一蓋本體。其中容器主體是屬於前開式箱形結構，且能儲 存多數精確基材W，底板係放置在此容器主體的底面上， 而蓋本體可以拆裝且用以關閉容器主體之前開口。如圖1 及2所示，對於容器主體來說，在兩內側壁上，分別形成 架子狀的支撐區段4，用以將多數精確基材垂直排成一直線 用以配置與儲存。而且，在蓋本體的內部表面上，放置有 一前檔板，用於固持多數精確基材W之前部位周圍。此前 檔板將每個精確基材W用以固持且用以在輸送期間確保安 全。 爲了將精確基材W從容器主體拿出來，所以蓋本體要 從容器主體的前面移開。當容器主體在加工期間移動而其 前開口是呈現打開狀態的時候，則在容器主體開口處且應 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4- 1226672 A7 B7 五、發明説明（2) (請先閱讀背面之注意事項再填寫本頁) 該要固持精確基材W之前檔板則不會在適當的位置。因此 ’在移動期間藉由裝置的振動與衝擊，在容器主體內部的 精確基材W可能會移動，且精確基材可能會從開口滑出來 而受損。或者，當基材輸送機器人相繼卸下精確基材W時 ，上一個移動的精確基材W可能會與基材輸送機器人的頭 部發生干涉，且精確基材W可能會受損。 爲了解決上述問題，習知地，已經提出一種方法，就 是其中在支撐區段4的前側上整體地形成止動器且可以藉 由這些止動器而限制精確基材之滑出。 然而，對於在支撐區段4的前側上形成止動器之方法 ，假如容器主體具有前開式箱形結構的話，當物體在模製 之後從金屬模離開時，則止動器可能會構成一種增加阻力 的結構，亦即下部凹陷（undercut)。於是，在容器主體的支 撐區段4形成止動器之方式在實際上相當困難。 經濟部智慧財產局員工消費合作社印製 而且，假如在容器主體的支撐區段4形成止動器的話 ，當容器主體以淸洗設備淸洗時，止動器會變成一種淸潔 液的障礙，且支撐區段4可能無法完全淸潔。於是，會繞 著止動器產生水滴集結，如此便成爲烘乾的障礙且造成烘 乾時間的延長。 爲了解決上述問題，可以使用一可移動組裝芯或一停 放芯（stay-put core)在金屬模中以形成止動器。另一方面， 金屬模可以被雜亂地分割成具有特殊結構。然而，在這些 措施中，有關於模的支出將會變得很大，且無法減少成本 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） -5- A7 1226672 B7_ 五、發明説明（3) (請先閲讀背面之注意事項再填寫本頁) 而且，像這種具有大直徑與小厚度之精確基材（例如具 有直徑300mm且厚度0.7mm之晶圓）很容易彎曲’而且其中 會有許多問題，例如在輸送期間會共振，相鄰的基材會互 相接觸，因而導致磨耗或破裂等問題。特別是對於背部硏 磨過的晶圓，其背表面被硏磨至小於0.4mm之極小厚度， 其彎曲情形相當顯著且使其難以輸送。 爲了解決上述問題，已經提出一種方法，就是將板安 裝在容器的後側以藉由將精確基材予以支撐而防止其彎曲 〇 然而，當在後側安裝這樣的支撐部分時，又有一個問 題，就是它們會與執行精確基材裝卸之輸送設備的精確基 材吸引臂發生干涉現象。 發明槪述 經濟部智慧財產局員工消費合作社印製 有鑑於上述問題，所以本發明之目的是要提供一種精 確基材之儲存容器，可減少金屬模的相關成本，以及當淸 洗容器主體時能使液體有效循環，且可以減少烘乾過程所 需之加工時間。 爲了達成上述目的，所以產生本發明，且其目的如下 根據本發明第一型態，精確基材之儲存容器係包含： 架子狀的支撐區段，用於擋住放在兩內側壁上之精確基材 ，及限制機構，用於限制精確基材從容器主體的開口滑出 ，其中限制機構包含一支撐板、彈性臂及緊貼件，而支撐 本紙張尺度適财@國家標準（0^)44規格（21(^297公釐) -6 - 1226672 經濟部智慧財產局員工消費合作社印製 ----~-五、發明説明（4) 板係以可裝卸方式安裝在容器主 個J i: ’彈性臂係從支撐板以正對 伸’且緊貼件係設置在正對著精 的自由端上。 根據本發明的第二型態，具 之儲存容器其特徵在於：在容器 開口側或支撐板上分別設有一凹 與突出部可彼此嚼合。 根據本發明的第三型態，具 之儲存容器其特徵在於：彈性臂 相反方向突出以超過支撐區段的 機構。 根據本發明的第四型態，具 之儲存容器其特徵在於：彈性臂 相反方向突出以超過支撐區段的 機構。 根據本發明的第五型態，精 子狀的支撐區段，用於擋住放在 及限制機構，用於減少在容器主 制機構包含一支撐板及彈性臂， 體開口的方向上延伸，而彈性臂 和分別安裝在架子狀支撐區段上 分別與精確基材之下表面接觸。 在本發明中，容器主體可以 體的至少一內側壁之開口 口之方向延 分之彈性臂 於容器主體開 確基材外圍部 有第一項特點的精確基材 主體至少一內側壁之任一 穴部或突出部，且凹穴部 有第一項特點的精確基材 部係分別在 成防止鬆弛 的緊貼件之下 下部，以便構 有第二項特點 的緊貼件之下 下部，以便構 確基材之儲存 兩內側壁上之 體中精確基材 彈性臂係在正 的緊貼件之下 之精確基材下 的精確基材 部係分別在 成防止鬆弛 容器包含架 精確基材， 之彎曲，限 對於容器主 部係延伸以 部重疊，且 是屬於前開式箱形結構 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公爱） (請先閱讀背面之注意事 項再填- :寫本頁) 1226672 A7 B7 五、發明説明（6) 圖式簡易說明 (請先閲讀背面之注意事項再填寫本頁) 圖1是一局部立體圖，顯示習知的精確基材之儲存容 器與精確基材； 圖2是一局部剖面圖，顯示習知的精確基材之儲存容 器的支撐區段與精確基材； 圖3是一立體圖，顯示本發明實施例的精確基材之儲 存容器； 圖4是一立體圖，顯示在本發明實施例的精確基材之 儲存容器中的容器主體； 圖5是一立體圖，顯示本發明實施例的精確基材之儲 存容器； 圖6是沿著圖5的線IV -1V所作之剖面圖； 圖7是沿著圖5的線V-V所作之剖面圖； 圖8是主要部位之立體圖，顯示本發明第二實施例的 精確基材之儲存容器； 圖9是沿著圖8的線VII-VII所作之剖面圖； 經濟部智慧財產局員工消費合作社印製 圖1 0是主要部位之立體圖，顯示本發明第三實施例的 精確基材之儲存容器； 圖11是一剖面圖，顯示垂直放置的本發明第三實施例 的精確基材之儲存容器之容器主體； 圖1 2是一上視圖，顯示本發明第四實施例的精確基材 之儲存容器之主要部位；及 圖13是沿著圖12的線XII-ΧΠ所作之剖面圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨〇><297公釐） -9- 1226672 A7 B7 五、發明説明（7) 經濟部智慧財產局8工消费合作社印製 主要元件對照表 W 精確基材 1 .容器主體 2 夾緊部 3 後檔板 4 支撐區段 5 插入部 6 底板 7 導引部 8 穿透孔 9 V溝紋 10 蓋本體 11 內部表面板 12 外部表面板 13 墊圈 14 夾緊板 15 開口 17 前檔板 20 限制機構 21 支撐板 22 彈性臂 23 緊貼件 30 防止鬆弛機構 (請先閲讀背面之注意事 I# 項再填. 裝-- :寫本頁) 訂 4 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10- 1226672 A7 B7 五、發明説明（8) 較佳實施例之詳細說明 (請先閲讀背面之注意事項再填寫本頁) 以下，將參考附圖說明本發明之較佳實施例。如圖3 到7所示，此實施例中的精確基材之儲存容器包含：一容 器主體1，用於儲存多數精確基材W(例如13片、25片或 26片）；一底板6，係放置在此容器主體1的底面上，及一 蓋本體10，可藉由無縫式密封墊圏13而可拆裝地關閉容器 主體1的前開口。在容器主體1的兩內側壁之前開口側上 ，分別可拆裝式地放置一對限制機構20，用以限制精確基 材W以免從容器主體1的前開口朝外滑出。 經濟部智慧財產局員工消費合作社印製 如圖3及4所示，容器主體係形成爲透明前開式箱形 ，藉由使用各種具有足夠強度及硬度之合成樹脂，例如聚 碳酸酯及聚丁烯對苯二酸酯樹脂。在容器主體Γ的底部表 面上，分別在前部兩側上及後部的中心處形成V溝紋9， 用作相對於處理裝備之位置決定機構。在此多數V溝紋9 上，裝配且固定有板狀的底板6。對於此底板6，除了上述 結構之外，在周圍的多數位置上，可以設置L形或其他形 狀之固定部位，而在容器主體1的底部，可以設置用於插 入固持部位之固持溝紋。藉由將這些部位嚙合在一起，可 以將底板6固持。也可以藉由使用螺旋部位或螺紋部位予 以固定。 而且’除了安裝在容器主體中的底板之外，可以在容 器主體上整體地設置多數具有V溝紋的位置決定機構。 如圖所示，容器主體1的前側係以寬度逐步橫向擴大 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -11 - 1226672 A7 B7 五、發明説明（9) (請先閲讀背面之注意事項再填寫本頁) 而形成的。.在內表面上，多數制動坑係以特定間隔形成於 凹穴（未顯示於圖形中）。從前部的左右兩側，夾緊部2分別 在左右橫向方向突起。而且，在容器主體1的內部後側， 安裝有後檔板3，用以固持多數精確基材W的後部外圍。 這些後檔板3在輸送期間係作用以安全地固持每個精確基 材。 在容器主體1的兩個內側壁上，如圖3到7所示，分 別形成架子狀的支撐區段4。這些支撐區段4的支撐溝紋係 配置且儲存多數精確基材W，這些精確基材係以特定間距 在從上到下之方向上排列成行，且同時水平地支撐每個精 確基材W。如圖3及7所示，從上到下，在容器主體1的 兩內側壁上之開口側，插入部5分別水平地朝前面方向突 出。每個插入部5係作用爲一突出部位。這些插入部5，除 了是細長的突出肋之外，也可以是I或L形的突出肋，或 形成爲凹穴部。在這些插入部5的表面上，爲了調整插入 力，半球形、三角形等之止動器突起或凹穴部位均可視需 要而形成。 經濟部智慈財產局員工消費合作社印製 如圖3所示，底板6係藉由使用如聚碳酸酯及聚丁烯 對苯二酸酯樹脂等之合成樹脂而形成大致平面的γ形。此 底板6設置有導引部7，係繞著前部的兩側上之V溝紋9插 入，而前部被區分成左右兩部分及後中心部分。在中心部 位上，設有一穿透孔8用以固定加工裝備。 蓋本體1 0包含一內部表面板11，係正對著一外部表面 板12而裝附，且以一密封墊圈1 3在周圍密封。在其左右 i紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' -12- 1226672 A7 B7 五、發明説明（1) — " (請先閲讀背面之注意事項再填寫本頁) 之間’考慮到原料的剛性，最好是2到3 · 5mm之間。藉由 含有一基材輸送機器人的自行裝載機可以不妨礙精確基材 W之輸送’每個緊貼件2 3係放置在比支撐區段4頂部還要 低0.7mm之咼度上，且以大約〇·2到〇.3mm的任意間隔正 對精確基材W。 在上述結構中，當藉由將蓋本體從容器主體1的前 面移開而打開容器主體1，且容器主體1在加工期間移動， 或者移動到其他基材加工裝備時，在容器主體丨的前側上 之此對限制機構20係作爲止動器。當每個彈性臂22的緊 貼件2 3導引精確基材W且有效防止它們滑出時（參考圖5) ’在谷窃主體內部之精確基材W將不會朝前側移動，且精 確基材將不會從前面滑出而在移動期間藉由裝置的振動與 衝擊有所損壞。而且，當基材輸送機器人再次卸下精確基 材W時，在移動的精確基材W與基材輸送機器人的手臂之 間將不會有干涉而導致精確基材W受損之危險。 經濟部智慧財產局員工消費合作社印製 藉由上述結構，作爲止動器的限制機構20絕不會整體 地形成在支撐區段4的前表面側上。於是，將不會有下部 凹陷出現，此下部凹陷會使壓模在模製時難以離開限制機 構20。結果，不需要使用可移動性組裝芯或停放芯來作爲 金屬模，或者將金屬模雜亂分割以具有特殊結構。藉此， 與金屬模有關之費用將會減少，且可以達到成本的大幅度 下降。而且，限制機構20可以放置到容器主體1上或從容 器主體移除。當容器主體1藉由淸洗設備淸潔時，假如限 制機構20係從容器主體1移除的話，將不會妨礙淸潔液體 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14- 1226672 A 7 B7 五、發明説明（12 ) (請先閲讀背面之注意事項再填寫本頁) 的循環，且支撐區段4可以被徹底淸洗。於是’顯著1抑制 殘餘的水滴且藉此縮短烘乾時間，則如此一來’可以增進 加工的效率。 而且，被移除的限制機構20可以與容器主體1分開淸 洗。此外，可以使用限制機構20作爲選擇性的部位’且當 受損時可以輕易更換。而且，由於支撐板21具有U形剖面 或水平的U形，亦即，組合用的溝紋，限制機構20可以輕 易放置到容器主體1的插入部位5中。而且，其製造也可 以簡單化。最後，在插入用的溝紋內圍部位，可以設置止 動器突起與止動器凹穴。 其次，圖8與圖9顯示本發明之第二實施例。在此情 形中，部分每個緊貼件23係延伸在容器主體1的後方’且 以一間隙與精確基材W的側部及相鄰部位局部重疊。每個 緊貼件23的底部變成一防止鬆弛機構30，此機構係面對相 鄰精確基材W的表面方向。 每個鬆驰防止機構30形成0.1到3mm的突起，最好是 從支撐區段4的底面突起1到2mm。放置鬆弛防止機構3 0 經濟部智慧財產局員工消費合作社印製 的底部突起，使其高度不會與帶出基材的機器人前臂干涉 〇 當鬆弛防止機構與儲存在容器主體的支撐區段之精確 基材的側面與相鄰部位外圍重疊時，這些重疊部位從下面 支撐以限制精確基材之彎曲。而且，藉由任意設定重疊量 且將彈性臂的強度設定得很大，則可以明顯控制背部硏磨 晶圓的彎曲，這些晶圓其後表面被硏磨至小於一般矽晶圓 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 1226672 A7 B7 五'發明説明（13) J¥度的一半且很容易受到大量彎曲，因此背部硏磨晶圓能 夠儲存在容器內且藉此輸送。 (請先閱讀背面之注意事項再填寫本頁) 至於其他部位，係與上述實施例相同，所以省略其說 明。 其次，圖10與圖1 1顯示本發明之第三實施例。在此 情形中，部分每個緊貼件23係在容器主體1的後方延伸， 且以一間隙與精確基材W的側部及相鄰部位局部重疊。在 垂直於相鄰精確基材W的表面之方向上延伸一防止鬆弛機 構30，此機構是防止鬆弛突起，且從每個緊貼件23呈現半 圓形或半橢圓形突起。 每個防止鬆驰機構3 0形成0 · 5到3 m m的突起，且從支 撐區段4的下端表面最好突出1到2mm。至於其他部位， 係與上述實施例相同，所以省略其說明。 經濟部智慧財產局8工消費合作社印製 藉由此實施例，即使垂直放置容器主體1，精確基材W 能夠有效防止彼此接觸所導致之可能損傷。爲了詳細說明 此點，當藉由自行裝載機而處理精確基材W時，從水平放 置的容器主體1中拿出水平精確基材W是相當方便的。然 而，對於要觀察精確基材W之情形時，可以從垂直放置的 容器主體1中拿出垂直的精確基材W。當容器主體丨的前 開口係朝上放置且精確基材W亦垂直放置時，精確基材w 的下部位置會被固定至後檔板3的支撐溝紋內側。然而， 由於在前開口處沒有限制精確基材移動之前檔板1 7，所以 在支撐區段4的多數精確基材W可能會鬆弛，且在最壞的 情形下，精確基材W可能會彼此接觸且因而受損。 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -16- 1226672 A7 B7 五、發明説明（14 ) (請先閲讀背面之注意事項再填寫本頁) 根據本實施例，即使容器主體1係垂直放置，藉由防 止鬆弛機構3 0的接觸，在支撐區段4的支撐溝紋內側之多 數精確基材W的鬆弛會被抑制到很小。因此，可以有效防 止多數精確基材W傾斜接觸且因而受損。 圖1 2與1 3顯示本發明精確基材之儲存容器的第四實 施例。在此情形中，每個緊貼件23的下部在精確基材的徑 向方向上重疊，如此以便支撐精確基材而不至於使其彎曲 。在此情形中，最好重疊的緊貼件之尖端位置可以放置在 精確基材的半徑之60%到90%範圍之間。而且，爲了不與 裝卸精確基材的輸送設備之操縱臂發生干涉，所以最好每 個相向的緊貼件尖端之間的間隔可以設定得比精確基材的 半徑還要寬5mm到30mm。 藉由以此方式重疊緊貼件而支撐住精確基材的下部， 可以減少精確基材的彎去至小於一半的程度，且可以安全 輸送精確基材而不會有任何損害。 經濟部智慧財產局員工消費合作社印奴 特別對於輸送例如背部硏磨晶圓之精確基材是很有效 的，其中這些晶圓在被硏磨的表面上形成有電子電路以符 合小厚度半導體之規格。 而且，在加工過的精確基材之情形中，由於精確基材 的下表面是否接觸本發明之限‘制機構並不是很重要，所以 重疊部分的水平高度可以被設定與精確基材的支撐部位之 支撐位置相同。 而且，也可以安裝防止鬆弛機構，係如上述限制機構 一樣從支撐區段的下表面突起。其他部分係與上述實施例 本紙張又度適用中國國家標準（CNS ) A4規格（210X297公釐） -17- 1226672 A7 B7 五、發明説明（15 ) 一~~ 相同。 (請先閱讀背面之注意事項再填寫本頁) 而且，在上述實施例中，作爲容器主體1的突出部之 插入部5係用以與作爲凹穴部之支撐板2 1嚙合。然而，它 們並未侷限至任何形式。例如，也可以構建成以下形式： 放置單一或多數凹穴部在容器主體1的側壁前側上而在支 撐板21上放置單一或多數突出部。這些凹穴部與突出部的 位置、數目、形狀等可以任意增加或減少。而且，可以使 用具有硬度的熱塑性樹脂來形成支撐板2 1，而可以使用熱 塑性彈性體來形成彈性臂22與緊貼件23。而且，除了含有 內部表面板11與外部表面板1 2之蓋本體1 〇以外，也可以 單一板形成。 如上所述，根據本發明，由於不需要應付下部凹陷， 所以本發明可以減少金屬模有關的支出。而且，由於限制 機構可以從容器主體移除，所以例如淸潔液等之液體可以 輕易循環且流入容器主體，以便達成縮短烘乾處理的處理 時間。 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18-1226672 A7 __B7 V. Description of the invention (1) Background of the invention, field of invention (please read the notes on the back before filling out this page) The present invention is a storage container for precise substrates for storing semiconductor wafers and glass substrates Precision substrates made of such materials. In detail, the present invention relates to an adjusting device for restricting a precise substrate from slipping out of an opening of a container, and reducing bending of the precise substrate supported by a supporting member. Description of the Conventional Technology In recent years, an accurate substrate W made of a semiconductor wafer can be formed in a large size to increase the yield, and processed by a storage container for the precise substrate by an automatic conveying machine. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This storage container with precise substrate includes a container body, a bottom plate and a lid body. The container body is a front-open box-shaped structure and can store most accurate substrates W. The bottom plate is placed on the bottom surface of the container body, and the lid body can be disassembled and used to close the opening of the container body. As shown in Figures 1 and 2, for the container main body, shelf-shaped support sections 4 are formed on the two inner side walls, respectively, to align most accurate substrates vertically in a straight line for deployment and storage. Furthermore, on the inner surface of the cover body, a front baffle plate is placed to hold around the front part of most accurate substrates W. Previously, the baffles used each precise substrate W to hold and to ensure safety during transport. In order to remove the precise substrate W from the container body, the lid body is removed from the front of the container body. When the container main body is moved during processing and its front opening is open, the Chinese national standard (CNS) A4 specification (210X297 mm) shall be applied at the container body opening and the paper size shall be -4- 1226672 A7 B7 five 2. Description of the invention (2) (Please read the precautions on the back before filling in this page.) The retaining plate that is to hold the precise substrate will not be in the proper position. Therefore, during the movement, the precise substrate W inside the container body may move by the vibration and impact of the device, and the precise substrate may slide out of the opening and be damaged. Alternatively, when the substrate transfer robot successively unloads the precise substrate W, the previously moved precise substrate W may interfere with the head of the substrate transfer robot, and the precise substrate W may be damaged. In order to solve the above problems, conventionally, a method has been proposed in which stoppers are integrally formed on the front side of the support section 4 and it is possible to limit the slide-out of precise substrates by these stoppers. However, for the method of forming the stopper on the front side of the support section 4, if the container body has a front-open box structure, the stopper may constitute an increase when the object leaves the metal mold after molding. The structure of resistance, namely the undercut. Therefore, the method of forming a stopper in the support section 4 of the container body is actually quite difficult. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. If the stopper is formed in the support section 4 of the container body, when the container body is cleaned by a cleaning device, the stopper will become an obstacle to cleaning liquid. And the support section 4 may not be completely cleaned. As a result, water droplets gather around the stopper, which becomes an obstacle to drying and prolongs the drying time. To solve the above problem, a movable assembly core or a stay-put core may be used in a metal mold to form a stopper. On the other hand, metal molds can be randomly divided into special structures. However, in these measures, the expenditure on molds will become very large, and the cost cannot be reduced. The paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) -5- A7 1226672 B7_ V. Description of the Invention (3) (Please read the precautions on the back before filling out this page) Moreover, precise substrates with large diameter and small thickness (such as wafers with a diameter of 300mm and a thickness of 0.7mm) are easy to bend. And there will be many problems, such as resonance during transportation, and adjacent substrates will contact each other, resulting in problems such as abrasion or cracking. Especially for back-honed wafers, the back surface is honed to an extremely small thickness of less than 0.4 mm, which has a significant bending situation and makes it difficult to transport. In order to solve the above problem, a method has been proposed in which a plate is mounted on the rear side of the container to prevent it from being bent by supporting an accurate substrate. However, when such a supporting portion is mounted on the rear side, there is another problem That is, they interfere with the precise substrate suction arm of the conveying equipment that performs precise substrate loading and unloading. The invention is described by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics. In view of the above problems, the purpose of the present invention is to provide a storage container with accurate substrates, which can reduce the related costs of metal molds, and can be used when cleaning the container body. The liquid is effectively circulated, and the processing time required for the drying process can be reduced. In order to achieve the above object, the present invention has been made, and the object thereof is as follows. According to the first aspect of the present invention, the storage container of the precise substrate includes: a shelf-shaped support section for blocking the precise substrate placed on the two inner side walls; Material, and a restriction mechanism for restricting the precise substrate from slipping out of the opening of the container body, wherein the restriction mechanism includes a support plate, an elastic arm, and a close-fitting member, and the paper is supported by the appropriate size of the paper @ Nationalstandard (0 ^) 44 Specifications (21 (^ 297 mm) -6-1226672 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ---- ~-V. Description of the invention (4) The board is removably installed on the main container J i: The 'elastic arm extends straight from the support plate' and the abutting member is disposed on the free end opposite to the fine. According to the second aspect of the present invention, the storage container is characterized in that: on the container opening side or The support plate is provided with a concave and a protruding portion, respectively, to be able to chew each other. According to a third aspect of the present invention, the storage container is characterized by a mechanism in which the elastic arm projects in the opposite direction to exceed the support section. Four types, According to a fifth aspect of the present invention, a sperm-shaped support section is used for blocking and limiting the mechanism, and for reducing the number of containers in the container. The main mechanism includes a support plate and an elastic arm, which extend in the direction of the body opening, and the elastic arm and each of the elastic arms are respectively mounted on the shelf-shaped support section and contact the lower surface of the precise substrate. In the present invention, the container body may be The elastic arm extending in the direction of the opening of at least one inner side wall of the container body is opened at the periphery of the substrate, and the precise substrate body has the first feature of any one of the holes or protrusions on the inner side wall, and the recess The precise base material part with the first feature is respectively lower and lower parts to prevent the slack fitting, so as to constitute the lower part of the close feature with the second feature, so as to determine the storage of the two inner side walls of the base material. In the above body, the precise substrate elastic arm is located under the positive substrate, and the precise substrate portion under the precise substrate is respectively bent to prevent the loose container from containing the precise substrate. The limit is for the main part of the container to extend and overlap, and it belongs to the front open box structure. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love) (Please read the precautions on the back before filling--write (This page) 1226672 A7 B7 V. Description of the invention (6) Simple illustration of the drawing (please read the precautions on the back before filling this page) Figure 1 is a partial perspective view showing the storage container and precise base of the conventional precision substrate Fig. 2 is a partial cross-sectional view showing a supporting section and a precise substrate of a storage container of a conventional precise substrate; Fig. 3 is a perspective view showing a storage container of the precise substrate according to the embodiment of the present invention; Fig. 4 Is a perspective view showing the container body in the storage container of the precise substrate according to the embodiment of the present invention; FIG. 5 is a perspective view showing the storage container of the precise substrate according to the embodiment of the present invention; FIG. 6 is a line along FIG. 5 A cross-sectional view taken along IV-1V; FIG. 7 is a cross-sectional view taken along line VV of FIG. 5; FIG. 8 is a perspective view of a main part showing a storage container for a precise substrate according to a second embodiment of the present invention; Figure 8 A cross-sectional view taken along line VII-VII; Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs; Figure 10 is a perspective view of the main part, showing the storage container of the precise substrate of the third embodiment of the present invention; FIG. 11 is a cross-sectional view , Showing the container body of the storage container of the precise substrate of the third embodiment of the present invention placed vertically; FIG. 12 is a top view showing the main part of the storage container of the accurate substrate of the fourth embodiment of the present invention; and FIG. 13 is a cross-sectional view taken along the line XII-XΠ of FIG. 12. This paper size is in accordance with Chinese National Standard (CNS) A4 specification (2 丨 〇 < 297 mm) -9- 1226672 A7 B7 V. Description of invention (7) Main components printed by the 8-industry consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Comparison table W Precise base material 1. Container body 2 Clamping part 3 Rear baffle 4 Support section 5 Insertion part 6 Bottom part 7 Guide part 8 Penetration hole 9 V groove 10 Cover body 11 Internal surface plate 12 External surface plate 13 Washer 14 Clamping plate 15 Opening 17 Front baffle plate 20 Restriction mechanism 21 Support plate 22 Elastic arm 23 Adhesive piece 30 Anti-slackening mechanism (Please read the note on the back I # before filling. Installation-: Write this page ) Order 4 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -10- 1226672 A7 B7 V. Description of the invention (8) Detailed description of the preferred embodiment (Please read the precautions on the back before filling (This page) Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. As shown in FIGS. 3 to 7, the storage container of the precise substrate in this embodiment includes: a container body 1 for storing most accurate substrates W (for example, 13, 25, or 26 pieces); a bottom plate 6, It is placed on the bottom surface of the container body 1 and a cover body 10, and the front opening of the container body 1 can be detachably closed by a seamless gasket 圏 13. On the opening sides in front of the two inner side walls of the container main body 1, a pair of restricting mechanisms 20 are detachably placed to restrict the precise substrate W so as not to slide out from the front opening of the container main body 1. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs as shown in Figures 3 and 4, the main container system is formed into a transparent front-open box shape, by using various synthetic resins with sufficient strength and hardness, such as polycarbonate and polybutene Terephthalate resin. V-grooves 9 are formed on the bottom surface of the container main body Γ on the sides of the front portion and the center of the rear portion, respectively, and are used as a position determination mechanism with respect to the processing equipment. A plate-shaped bottom plate 6 is assembled and fixed to the majority of the V-grooves 9. In addition to the above-mentioned structure, the base plate 6 can be provided with L-shaped or other shaped fixing portions at most positions around it, and the bottom of the container body 1 can be provided with holding grooves for inserting the holding portions. By engaging these parts together, the base plate 6 can be held. It can also be fixed by using a screw portion or a threaded portion. Further, in addition to the bottom plate installed in the container body, a plurality of position determining mechanisms having V-grooves can be integrally provided on the container body as a whole. As shown in the figure, the front side of the container body 1 gradually expands horizontally with the width. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -11-1226672 A7 B7 V. Description of the invention (9) (Please read first Note on the back page and then fill out this page). On the inner surface, most brake pits are formed in the recesses at specific intervals (not shown in the figure). From the left and right sides of the front portion, the clamping portions 2 protrude in the left and right lateral directions, respectively. Further, a rear baffle plate 3 is mounted on the inner rear side of the container main body 1 to hold the outer periphery of the rear portion of most accurate substrates W. These backstops 3 act during transportation to securely hold each precise substrate. On the two inner side walls of the container main body 1, as shown in Figs. 3 to 7, rack-shaped supporting sections 4 are formed, respectively. The supporting grooves of these supporting sections 4 are arranged and store a plurality of precise substrates W, which are arranged in a row at a certain pitch from the top to the bottom, while simultaneously supporting each precise substrate W horizontally. As shown in Figs. 3 and 7, the insertion portions 5 protrude horizontally in the front direction from the top to the bottom on the opening sides of the two inner side walls of the container body 1, respectively. Each insertion portion 5 functions as a protruding portion. In addition to these elongated protruding ribs, these insertion portions 5 may be I- or L-shaped protruding ribs or formed as recessed portions. On the surfaces of these insertion portions 5, in order to adjust the insertion force, stopper protrusions or recesses such as hemispherical, triangular, etc. can be formed as needed. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs As shown in Fig. 3, the bottom plate 6 is formed into a substantially flat gamma shape by using synthetic resins such as polycarbonate and polybutylene terephthalate resin. The bottom plate 6 is provided with a guide portion 7 which is inserted around the V-grooves 9 on both sides of the front portion, and the front portion is divided into left and right portions and a rear central portion. In the center, a penetrating hole 8 is provided to fix the processing equipment. The cover body 10 includes an inner surface plate 11 which is attached directly to an outer surface plate 12 and is sealed with a sealing gasket 13 around it. Applicable Chinese National Standard (CNS) A4 specifications (210X297 mm) on its left and right paper sizes. -12-12672672 A7 B7 V. Description of the invention (1) — " (Please read the precautions on the back before filling this page) Considering the rigidity of the raw material, it is preferably between 2 and 3.5 mm. By using a self-loading machine containing a substrate conveying robot, it is possible to prevent the precise substrate W from being conveyed. 'Each contact piece 2 3 is placed at a height of 0.7 mm lower than the top of the support section 4, and Arbitrary intervals of about 0.2 to 0.3 mm face the precise substrate W. In the above structure, when the container body 1 is opened by moving the cover body from the front of the container body 1, and the container body 1 is moved during processing, or is moved to other substrate processing equipment, on the front side of the container body The pair of restriction mechanisms 20 serve as a stopper. When the abutment members 2 3 of each elastic arm 22 guide the precise substrate W and effectively prevent them from slipping out (refer to FIG. 5) 'The precise substrate W inside the burglar main body will not move toward the front side, and is accurate The substrate will not slide out from the front and will be damaged by the vibration and impact of the device during the movement. Moreover, when the substrate transport robot unloads the precise substrate W again, there will be no interference between the moving precise substrate W and the arm of the substrate transport robot, resulting in the risk of damage to the precise substrate W. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs With the above structure, the restricting mechanism 20 as a stopper will never be integrally formed on the front surface side of the support section 4. Thus, there will be no lower depressions which would make it difficult for the stamper to leave the restricting mechanism 20 during molding. As a result, it is not necessary to use a movable assembly core or a parking core as a metal mold, or to scatter the metal mold to have a special structure. As a result, the costs associated with metal molds will be reduced, and a significant reduction in costs can be achieved. Moreover, the restriction mechanism 20 may be placed on the container body 1 or removed from the container body. When the container body 1 is cleaned by a cleaning device, if the restricting mechanism 20 is removed from the container body 1, it will not prevent the cleaning liquid. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -14- 1226672 A 7 B7 5. The cycle of the description of the invention (12) (please read the precautions on the back before filling this page), and the support section 4 can be thoroughly washed. Therefore, 'significantly 1 suppresses residual water droplets and thereby shortens the drying time, so that' can improve the processing efficiency. Moreover, the removed restriction mechanism 20 can be washed separately from the container body 1. Further, the restriction mechanism 20 can be used as an optional portion 'and can be easily replaced when damaged. Further, since the supporting plate 21 has a U-shaped cross section or a horizontal U-shape, that is, a combination groove, the restricting mechanism 20 can be easily placed in the insertion site 5 of the container body 1. Moreover, its manufacturing can be simplified. Finally, a stopper protrusion and a stopper recess may be provided at the inner periphery of the groove for insertion. 8 and 9 show a second embodiment of the present invention. In this case, part of each of the abutting members 23 extends behind the container body 1 'and partially overlaps the side and adjacent portions of the precise base material W with a gap. The bottom of each abutment member 23 becomes a slack preventing mechanism 30 which faces the surface direction of the adjacent precise substrate W. Each slack prevention mechanism 30 is formed with a protrusion of 0.1 to 3 mm, preferably 1 to 2 mm from the bottom surface of the support section 4. Place the sag prevention mechanism 3 0 The bottom protrusion printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs so that its height will not interfere with the forearm of the robot that takes out the substrate. When the slack prevention mechanism is accurate with the support section stored in the container When the sides of the substrate overlap the periphery of adjacent parts, these overlapping parts are supported from below to limit the bending of the precise substrate. Moreover, by arbitrarily setting the amount of overlap and setting the strength of the elastic arm to be large, the curvature of the back honing wafers can be significantly controlled, and the rear surface of these wafers is honing to be smaller than the general silicon wafer. China National Standard (CNS) A4 specification (210X297 mm) -15- 1226672 A7 B7 Five 'invention description (13) Half of J ¥ degrees and easily susceptible to a lot of bending, so the back-honed wafer can be stored in a container and Take this delivery. (Please read the notes on the back before filling out this page.) As for other parts, it is the same as the above embodiment, so its explanation is omitted. Next, FIG. 10 and FIG. 11 show a third embodiment of the present invention. In this case, part of each of the abutting members 23 extends behind the container body 1 and partially overlaps the side and adjacent portions of the precise base material W with a gap. A slack preventing mechanism 30 extending in a direction perpendicular to the surface of the adjacent precise substrate W is a slack preventing protrusion, and each of the abutting members 23 presents a semi-circular or semi-ellipsoidal protrusion. Each slack preventing mechanism 30 forms a protrusion of 0.5 to 3 mm, and preferably protrudes from the lower end surface of the support section 4 by 1 to 2 mm. The other parts are the same as those of the above-mentioned embodiment, so the description is omitted. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives. With this embodiment, even if the container body 1 is placed vertically, the precise substrate W can effectively prevent possible damage caused by contact with each other. To explain this in detail, when processing the precise substrate W by a self-loader, it is quite convenient to take out the horizontal accurate substrate W from the horizontally placed container body 1. However, in the case where the precise base material W is to be observed, the vertical precise base material W can be taken out from the container body 1 which is vertically placed. When the front opening of the container body is placed upward and the precise substrate W is also placed vertically, the lower position of the precise substrate w will be fixed to the inner side of the support groove of the rear baffle plate 3. However, since the front plate 17 is not restricted from moving the precise substrate at the front opening, most of the accurate substrates W in the support section 4 may be loosened, and in the worst case, the accurate substrates W may be mutually Contact and thus damage. This paper size applies to China National Standard (CNS) A4 (210X297 mm) -16- 1226672 A7 B7 V. Description of the invention (14) (Please read the precautions on the back before filling this page) According to this embodiment, even The container body 1 is placed vertically. By preventing the relaxation mechanism 30 from coming into contact, the relaxation of most of the precise substrates W inside the support grooves of the support section 4 can be suppressed to a small extent. Therefore, it is possible to effectively prevent most precise substrates W from coming into oblique contact and thus being damaged. Figures 12 and 13 show a fourth embodiment of the storage container for the precise substrate of the present invention. In this case, the lower portion of each abutment member 23 overlaps in the radial direction of the precise substrate so as to support the accurate substrate without being bent. In this case, it is desirable that the tip positions of the overlapping clasps can be placed between 60% and 90% of the radius of the precise substrate. In addition, in order not to interfere with the control arm of the conveying equipment for loading and unloading precise substrates, it is desirable that the interval between the tips of each opposing abutment member be set to be 5 mm to 30 mm wider than the radius of the precise substrate. By supporting the lower part of the precision substrate by overlapping the clings in this way, the bending of the precision substrate can be reduced to less than half, and the precision substrate can be safely conveyed without any damage. The Intellectual Cooperative, an employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, is particularly effective in transporting precise substrates such as back-honed wafers, where these wafers have electronic circuits formed on the surface to be honed to meet the specifications of small thickness semiconductor . Moreover, in the case of processed precision substrates, since it is not important whether the lower surface of the precision substrate contacts the limiting mechanism of the present invention, the horizontal height of the overlapping portion can be set to the support position of the precision substrate. The support position is the same. Further, a slack preventing mechanism may be installed, which protrudes from the lower surface of the support section like the restricting mechanism described above. The other parts are the same as the above-mentioned embodiment. This paper is also applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -17- 1226672 A7 B7. 5. Description of the invention (15) 1 ~~ The same. (Please read the cautions on the back before filling in this page.) Moreover, in the above embodiment, the insertion portion 5 as the protruding portion of the container body 1 is used to engage with the support plate 21 as the recessed portion. However, they are not limited to any form. For example, it may be constructed as follows: a single or a plurality of recesses are placed on the front side of the side wall of the container body 1 and a single or a plurality of protrusions are placed on the support plate 21. The position, number, shape, etc. of these recessed portions and protruding portions can be arbitrarily increased or decreased. Further, the support plate 21 can be formed using a thermoplastic resin having hardness, and the elastic arm 22 and the contact member 23 can be formed using a thermoplastic elastomer. In addition, the cover body 10 including the inner surface plate 11 and the outer surface plate 12 may be formed as a single plate. As described above, according to the present invention, since it is not necessary to cope with the lower depression, the present invention can reduce the expenses related to the metal mold. Moreover, since the restricting mechanism can be removed from the container body, liquids such as cleaning solution can be easily circulated and flowed into the container body, so as to shorten the processing time of the drying process. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is sized to the Chinese National Standard (CNS) A4 (210X297 mm) -18-